Abstract: Disclosed herein is an RF generator that includes an inverter including first and second switching elements controlled by a PWM control signal and converting a DC voltage having a predetermined level outputted from the DC/DC converter into an AC voltage having a predetermined level, an LC filter that outputs a sine wave resonance signal having a predetermined resonance frequency from a high frequency signal, a transformer that induces a high frequency power signal of a pulse waveform outputted from the LC filter to a secondary side, an ignition module that sets a switching frequency at the termination of an ignition mode as an ignition mode escape frequency, an operation module that applies the ignition mode escape frequency as an initial value of a switching frequency in an operation mode, and a signal controller that generates the PWM control signal by using the switching frequency.

Abstract: Disclosed herein is an RF generator that includes an inverter including first and second switching elements controlled by a PWM control signal and converting a DC voltage having a predetermined level outputted from the DC/DC converter into an AC voltage having a predetermined level, an LC filter that outputs a sine wave resonance signal having a predetermined resonance frequency from a high frequency signal, a transformer that induces a high frequency power signal of a pulse waveform outputted from the LC filter to a secondary side, an ignition module that sets a switching frequency at the termination of an ignition mode as an ignition mode escape frequency, an operation module that applies the ignition mode escape frequency as an initial value of a switching frequency in an operation mode, and a signal controller that generates the PWM control signal by using the switching frequency.

Abstract: Disclosed herein is an RF generator that includes an inverter including first and second switching elements controlled by a PWM control signal and converting a DC voltage having a predetermined level outputted from the DC/DC converter into an AC voltage having a predetermined level, an LC filter that outputs a sine wave resonance signal having a predetermined resonance frequency from a high frequency signal, a transformer that induces a high frequency power signal of a pulse waveform outputted from the LC filter to a secondary side, an ignition module that sets a switching frequency at the termination of an ignition mode as an ignition mode escape frequency, an operation module that applies the ignition mode escape frequency as an initial value of a switching frequency in an operation mode, and a signal controller that generates the PWM control signal by using the switching frequency.

Abstract: DC-DC converter according to an exemplary embodiment of the inventive concept includes: a first transformation unit including a first primary winding and a second primary winding and configured to convert a voltage applied to the first primary winding or the second primary winding and output the converted voltage to a first secondary winding; a second transformation unit including a third primary winding and a fourth primary winding and configured to convert a voltage applied to the third primary winding or the fourth primary winding and output the converted voltage to a second secondary winding, wherein the first primary winding and the third primary winding are connected to each other in series, and the second primary winding and the fourth primary winding are connected to each other in series.