Patents by Inventor Sooyun Joh
Sooyun Joh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10526708Abstract: A method and apparatus are provided for plasma-based processing of a substrate based on a plasma source having a first, second and third electrodes disposed above a pedestal. The second electrode is disposed between the first and third electrodes. A first gap is formed between the first electrode and the pedestal and between the third electrode and the pedestal. A second gap is formed between the first and second electrodes, and a third gap is formed between the second and third electrodes. A first radio frequency (RF) power supply is connected to the first and third electrodes and is configured to predominantly deliver power to plasmas located in the first gap. A second RF power supply is connected to the second electrode and is configured to predominantly deliver power to plasmas located in the second and third gaps.Type: GrantFiled: March 12, 2018Date of Patent: January 7, 2020Assignee: AIXTRON SEInventors: Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Allan Wiesnoski, Sooyun Joh
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Patent number: 10147507Abstract: A steam generator for a nuclear reactor comprises plenums proximate with a first plane, wherein the first plane intersects a bottom portion of a riser column of a reactor vessel. The steam generator may further comprise plenums proximate with a second plane, approximately parallel with the first plane, wherein the second plane intersects a top portion of the riser column of the reactor vessel. The steam generator may further include a plurality of steam generator tubes that convey coolant from a plenum located proximate with the first plane to one of the plenums proximate with the second plane.Type: GrantFiled: December 11, 2014Date of Patent: December 4, 2018Assignee: NuScale Power, LLCInventors: John T. Groome, Sooyun Joh, James Allan Nylander
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Patent number: 10049859Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: GrantFiled: July 8, 2010Date of Patent: August 14, 2018Assignee: Aixtron SEInventors: Stephen Edward Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Publication number: 20180202046Abstract: A method and apparatus are provided for plasma-based processing of a substrate based on a plasma source having a first, second and third electrodes disposed above a pedestal. The second electrode is disposed between the first and third electrodes. A first gap is formed between the first electrode and the pedestal and between the third electrode and the pedestal. A second gap is formed between the first and second electrodes, and a third gap is formed between the second and third electrodes. A first radio frequency (RF) power supply is connected to the first and third electrodes and is configured to predominantly deliver power to plasmas located in the first gap. A second RF power supply is connected to the second electrode and is configured to predominantly deliver power to plasmas located in the second and third gaps.Type: ApplicationFiled: March 12, 2018Publication date: July 19, 2018Inventors: Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Allan Wiesnoski, Sooyun Joh
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Publication number: 20160289837Abstract: A method and apparatus are provided for plasma-based processing of a substrate based on a plasma source having at least two adjacent electrodes positioned with the long dimensions parallel to define a first minimum gap between the two electrodes of from 5 millimeters to 40 millimeters. A second minimum gap is defined between the two electrodes and the substrate. AC power is provided to the two electrodes through separate electrical circuits from a common supply with a phase difference therebetween. A first gas and a second gas are injected into the plasma-containing volume between the two electrodes at different positions relative to the substrate. A lower electrode with a lower electrode width that is less than the combined width of the two electrodes is powered from a separately controllable AC power supply at an AC frequency different from that supplied to the two electrodes.Type: ApplicationFiled: June 1, 2016Publication date: October 6, 2016Inventors: Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Allan Wiesnoski, Sooyun Joh
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Patent number: 9443702Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: GrantFiled: June 9, 2015Date of Patent: September 13, 2016Assignee: Aixtron SEInventors: Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Patent number: 9359674Abstract: The disclosed invention includes apparatus and methods that may be used for plasma-based deposition of thin layers of material on separate or continuous web substrates at very low temperatures with very low defect density. It achieves superior control of gas phase chemistry by controlling the sequence of introduction of gaseous components. It also has substantially independent control over the rate of chemical processes in the gas and of the amount of power and energy of ion bombardment. Such control enables high quality single and multi-layer films to be deposited cost effectively and uniformly over larger areas under very low temperature conditions.Type: GrantFiled: July 1, 2014Date of Patent: June 7, 2016Assignee: Aixtron, Inc.Inventors: Stephen Edward Savas, Sai Mantripragada, Sooyun Joh, Allan B. Wiesnoski, Carl Galewski
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Patent number: 9230697Abstract: A steam generator for a nuclear reactor comprises plenums proximate with a first plane, wherein the first plane intersects a bottom portion of a riser column of a reactor vessel. The steam generator may further comprise plenums proximate with a second plane, approximately parallel with the first plane, wherein the second plane intersects a top portion of the riser column of the reactor vessel. The steam generator may further include a plurality of steam generator tubes that convey coolant from a plenum located proximate with the first plane to one of the plenums proximate with the second plane.Type: GrantFiled: April 20, 2012Date of Patent: January 5, 2016Assignee: NUSCALE POWER, LLCInventors: John T. Groome, Sooyun Joh, James Allan Nylander
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Publication number: 20150270109Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: ApplicationFiled: June 9, 2015Publication date: September 24, 2015Inventors: Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Patent number: 9096933Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: GrantFiled: April 15, 2014Date of Patent: August 4, 2015Assignee: Aixtron, Inc.Inventors: Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Patent number: 9096932Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: GrantFiled: April 14, 2014Date of Patent: August 4, 2015Assignee: Aixtron, Inc.Inventors: Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Publication number: 20150103967Abstract: A steam generator for a nuclear reactor comprises plenums proximate with a first plane, wherein the first plane intersects a bottom portion of a riser column of a reactor vessel. The steam generator may further comprise plenums proximate with a second plane, approximately parallel with the first plane, wherein the second plane intersects a top portion of the riser column of the reactor vessel. The steam generator may further include a plurality of steam generator tubes that convey coolant from a plenum located proximate with the first plane to one of the plenums proximate with the second plane.Type: ApplicationFiled: December 11, 2014Publication date: April 16, 2015Inventors: John T. Groome, Sooyun Joh, James Allan Nylander
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Publication number: 20140314965Abstract: The disclosed invention includes apparatus and methods that may be used for plasma-based deposition of thin layers of material on separate or continuous web substrates at very low temperatures with very low defect density. It achieves superior control of gas phase chemistry by controlling the sequence of introduction of gaseous components. It also has substantially independent control over the rate of chemical processes in the gas and of the amount of power and energy of ion bombardment. Such control enables high quality single and multi-layer films to be deposited cost effectively and uniformly over larger areas under very low temperature conditions.Type: ApplicationFiled: July 1, 2014Publication date: October 23, 2014Inventors: Stephen Edward Savas, Sai Mantripragada, Sooyun Joh, Allan B. Wiesnoski, Carl Galewski
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Publication number: 20140220262Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: ApplicationFiled: April 15, 2014Publication date: August 7, 2014Applicant: PLASMASI, INC.Inventors: Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Publication number: 20140212601Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: ApplicationFiled: April 14, 2014Publication date: July 31, 2014Applicant: PlasmaSi, Inc.Inventors: Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Patent number: 8765232Abstract: The disclosed invention includes apparatus and methods that may be used for plasma-based deposition of thin layers of material on separate or continuous web substrates at very low temperatures with very low defect density. It achieves superior control of gas phase chemistry by controlling the sequence of introduction of gaseous components. It also has substantially independent control over the rate of chemical processes in the gas and of the amount of power and energy of ion bombardment. Such control enables high quality single and multi-layer films to be deposited cost effectively and uniformly over larger areas under very low temperature conditions.Type: GrantFiled: January 10, 2012Date of Patent: July 1, 2014Assignee: PlasmaSi, Inc.Inventors: Stephen Edward Savas, Sai Mantripragada, Sooyun Joh, Allan B. Wiesnoski, Carl Galewski
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Patent number: 8697197Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.Type: GrantFiled: July 8, 2010Date of Patent: April 15, 2014Assignee: Plasmasi, Inc.Inventors: Stephen Edward Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh
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Publication number: 20130337657Abstract: A method and apparatus are provided for plasma-based processing of a substrate based on a plasma source having at least two adjacent electrodes positioned with the long dimensions parallel to define a first gap minimum between the two electrodes of from 5 millimeters to 40 millimeters. A second gap minimum is defined between the two electrodes and the substrate. AC power is provided to the two electrodes through separate electrical circuits from a common supply with the phase difference therebetween. A first gas and a second are injected into the plasma-containing volume between the two electrodes are different positions relative to the substrate. A lower electrode with a lower electrode width that is less than the combined width of the two electrodes is powered from a separately controllable ac power supply at an ac frequency different from that supplied to the two electrodes.Type: ApplicationFiled: June 19, 2013Publication date: December 19, 2013Inventors: Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Allan Wiesnoski, Sooyun Joh
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Publication number: 20130279643Abstract: A steam generator for a nuclear reactor comprises plenums proximate with a first plane, wherein the first plane intersects a bottom portion of a riser column of a reactor vessel. The steam generator may further comprise plenums proximate with a second plane, approximately parallel with the first plane, wherein the second plane intersects a top portion of the riser column of the reactor vessel. The steam generator may further include a plurality of steam generator tubes that convey coolant from a plenum located proximate with the first plane to one of the plenums proximate with the second plane.Type: ApplicationFiled: April 20, 2012Publication date: October 24, 2013Inventors: John T. Groome, Sooyun Joh, James Allan Nylander
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Patent number: 8291935Abstract: Each of plurality of gas sources flows to a different one of a plurality of separate source gas flow paths. Then, a source gas is distributed directly from each of plurality of separate source gas flow paths to a plurality of separate gas mixture flow paths, thereby distributing a plurality of source gases to each of different flow paths. A plurality of separate gas mixture streams is generated by flowing a plurality of source gases in each of a plurality of separate gas mixture flow paths. In some embodiments, each of a plurality of separate source gas flow paths comprises a gas distribution duct, and each of a plurality of gas mixture flow paths comprises a gas mixing conduit. In some embodiments, a gas distribution duct includes a plurality of gas distribution ports and a gas source port connectable to a gas source. In some embodiments, a gas mixing conduit comprises a plurality of gas inlet holes, a gas mixing region, and a gas outlet hole.Type: GrantFiled: April 7, 2009Date of Patent: October 23, 2012Assignee: Novellus Systems, Inc.Inventors: Neil J. Merritt, Kevin D. Jennings, George A. Gilbert, David E. Bowser, Sooyun Joh