Abstract: Disclosed are dielectric barrier discharge (DBD) devices and methods of use for sterilizing surfaces. The DBD devices generally include one or more first electrodes, one or more second electrodes or chemical reagent layers, and at least one dielectric layer between the one or more first electrodes and the one or more second electrodes or chemical reagent layers. In various configurations, the at least one dielectric layer is either (a) in contact with at least one of the first electrodes or (if present) at least one chemical reagent layer, or (b) is separated from the one or more first electrodes by a first gap and is also separated from the one or more second electrodes or chemical reagent layers by a second gap.