Patents by Inventor Sorin Dinescu

Sorin Dinescu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250067797
    Abstract: Disclosed herein are systems and methods comprising a thermal control wafer (TCW) comprising a plurality of heater zones. A heater zone may comprise a heater-sensing element that generates heat during a heating mode and provides a resistance during a sensing mode. During testing, a wafer under test (WUT) may be placed on top of a chuck assembly. The TCW may be part of or separate from the chuck assembly. Controlling one or more heater zones on the TCW may control the temperatures of DUT(s) while being tested. The thermal controller may comprise a plurality of thermal control channel multiplexed to a plurality of heater zones. E.g., one or more first heater zones can be activated at a first time, one or more second heater zones can be activated at a second time, one or more third heater zones can be activated at a third time, etc.
    Type: Application
    Filed: August 7, 2024
    Publication date: February 27, 2025
    Inventors: Carl L. OSTROWSKI, Terry Sinclair CONNACHER, Samer KABBANI, Enrique ALEMAN, Thomas P. JONES, Sorin DINESCU
  • Patent number: 12085609
    Abstract: Disclosed herein are systems and methods comprising a thermal control wafer (TCW) comprising a plurality of heater zones. A heater zone may comprise a heater-sensing element that generates heat during a heating mode and provides a resistance during a sensing mode. During testing, a wafer under test (WUT) may be placed on top of a chuck assembly. The TCW may be part of or separate from the chuck assembly. Controlling one or more heater zones on the TCW may control the temperatures of DUT(s) while being tested. The thermal controller may comprise a plurality of thermal control channel multiplexed to a plurality of heater zones. E.g., one or more first heater zones can be activated at a first time, one or more second heater zones can be activated at a second time, one or more third heater zones can be activated at a third time, etc.
    Type: Grant
    Filed: August 23, 2023
    Date of Patent: September 10, 2024
    Assignee: AEM Singapore Pte. Ltd.
    Inventors: Carl L. Ostrowski, Terry Sinclair Connacher, Samer Kabbani, Enrique Aleman, Thomas P. Jones, Sorin Dinescu
  • Patent number: 12013432
    Abstract: Disclosed herein are systems and methods comprising a thermal control wafer (TCW) comprising a plurality of heater zones. A heater zone may comprise a heater-sensing element that generates heat during a heating mode and provides a resistance during a sensing mode. During testing, a wafer under test (WUT) may be placed on top of a chuck assembly. The TCW may be part of or separate from the chuck assembly. Controlling one or more heater zones on the TCW may control the temperatures of DUT(s) while being tested. The thermal controller may comprise a plurality of thermal control channel multiplexed to a plurality of heater zones. E.g., one or more first heater zones can be activated at a first time, one or more second heater zones can be activated at a second time, one or more third heater zones can be activated at a third time, etc.
    Type: Grant
    Filed: August 23, 2023
    Date of Patent: June 18, 2024
    Assignee: AEM Singapore Pte. Ltd.
    Inventors: Carl L. Ostrowski, Terry Sinclair Connacher, Samer Kabbani, Enrique Aleman, Thomas P. Jones, Sorin Dinescu
  • Patent number: 9340462
    Abstract: A monolithic, substantially hermetic joining or bonding of two or more aluminum nitride (“AlN”) ceramic components is made by promoting transient liquid phase sintering near the contact areas between the components. In a first approach, AlN particles are combined with a rare earth oxide sintering additive such as yttrium oxide (Y2O3) in a joining paste can be applied between the joining surfaces of fired ceramic preformed components prior to final firing to weld the components together. In a second approach, the additive is added to green mixture, and the components having different shrinkage aspect ratios are mated and cofired in an atmosphere containing a partial pressure of the additive. The additive encourages wetting and diffusion of the liquid phases present on the surfaces of ceramic interface particles in the contact areas during final firing.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: May 17, 2016
    Assignee: Oasis Materials Corporation
    Inventors: Jonathan H. Harris, Frank J. Polese, Robert J. Tesch, Stephen P. Nootens, Sorin Dinescu, William L. Bradbury, Casey C. Clausen
  • Publication number: 20130319762
    Abstract: A monolithic, substantially hermetic joining or bonding of two or more aluminum nitride (“AlN”) ceramic components is made by promoting transient liquid phase sintering near the contact areas between the components. In a first approach, AlN particles are combined with a rare earth oxide sintering additive such as yttrium oxide (Y2O3) in a joining paste can be applied between the joining surfaces of fired ceramic preformed components prior to final firing to weld the components together. In a second approach, the additive is added to green mixture, and the components having different shrinkage aspect ratios are mated and cofired in an atmosphere containing a partial pressure of the additive. The additive encourages wetting and diffusion of the liquid phases present on the surfaces of ceramic interface particles in the contact areas during final firing. Such processes can be used to form complex ceramic structures such as a ceramic susceptor used in integrated circuit fabrication.
    Type: Application
    Filed: March 15, 2013
    Publication date: December 5, 2013
    Inventors: Jonathan H. Harris, Frank J. Polese, Robert J. Tesch, Stephen P. Nootens, Sorin Dinescu, William L. Bradbury