Abstract: Intervals are provided between rolling elements in a load area to avoid jostling of rolling elements in a rolling device. A portion of a transfer groove has such a sectional shape as to form a contact point changing path for coming in contact with smaller diameter portions of the rolling elements than outer diameters of the rolling elements to thereby reduce revolution quantities of the rolling elements to bring rolling elements in contact with or close to each other at this portion. Then, when the rolling elements come out of the contact point changing path, the outer diameter portions of the rolling elements come in contact with the transfer groove to thereby increase the revolution quantities of the rolling elements to create intervals between the rolling elements entering the load area.

Abstract: In order to omit jostling caused between the adjacent rolling elements, a clearance is formed therebetween in a load region. A transfer path has a region that allows the rolling elements to contact only one of the transfer grooves of the transfer path, or a region that has a friction force acting between one of the transfer grooves of the transfer path and the rolling elements being greater than the friction force acting between another one of the transfer grooves of the transfer path and the rolling elements. The one of the transfer grooves in the region has a cross sectional shape taken in a direction perpendicular to the direction, in which the rolling elements are transferred, which cross sectional shape allowing two point contact with the rolling elements; and the rolling apparatus further has a contact-angle changing path that has a contact angle with the rolling elements that is greater than the contact angle of the other portion of the transfer path.

Abstract: Intervals are provided between rolling elements in a load area to avoid jostling of rolling elements in a rolling device. A portion of a transfer groove has such a sectional shape as to form a contact point changing path for coming in contact with smaller diameter portions of the rolling elements than outer diameters of the rolling elements to thereby reduce revolution quantities of the rolling elements to bring rolling elements in contact with or close to each other at this portion. Then, when the rolling elements come out of the contact point changing path, the outer diameter portions of the rolling elements come in contact with the transfer groove to thereby increase the revolution quantities of the rolling elements to create intervals between the rolling elements entering the load area.

Abstract: In order to omit jostling caused between the adjacent rolling elements, a clearance is formed therebetween in a load region. A transfer path has a region that allows the rolling elements to contact only one of the transfer grooves of the transfer path, or a region that has a friction force acting between one of the transfer grooves of the transfer path and the rolling elements being greater than the friction force acting between another one of the transfer grooves of the transfer path and the roiling elements. The one of the transfer grooves in the region has a cross sectional shape taken in a direction perpendicular to the direction, in which the rolling elements are transferred, which cross sectional shape allowing two point contact with the rolling elements; and the rolling apparatus further has a contact-angle changing path that has a contact angle with the rolling elements that is greater than the contact angle of the other portion of the transfer path.

Abstract: Separating members are provided at both ends in a moving direction of each of workpiece mounting seats of a carriage. Each of the separating members separates an elastic seal blade, which seals an opening portion formed between a side wall portion of a casing body and a top plate, from an outer surface of a workpiece mounting seat.

Abstract: Separating members are provided at both ends in a moving direction of each of workpiece mounting seats of a carriage. Each of the separating members separates an elastic seal blade, which seals an opening portion formed between a side wall portion of a casing body and a top plate, from an outer surface of a workpiece mounting seat.

Abstract: A dustproof linear actuator has: a housing with a slit extending axially; a linear guide device disposed in the housing; a carriage mounted in the housing and axially movable along the slit by the linear guide device, the carriage including a workpiece mounting table protruding from the housing through the slit; a linear drive device disposed in the housing for moving the carriage axially; a pair of pulleys disposed in an axial end of the housing; and a sealing band mounted around the pulleys within the housing movably for closing the slit, the sealing band including first and second ends which are fastened to first and second ends of the carriage, respectively, to form a circulative loop. Further, the dustproof linear actuator has an air venting device for venting air existing in the housing close to the axial end toward an outside of the housing so that the dustproof linear actuator can remarkably prevents the dust particles from leaking out of the housing by reducing the pressure inside the actuator.

Abstract: A dustproof linear actuator has: a housing with a slit extending axially; a linear guide device disposed in the housing; a carriage mounted in the housing and axially movable along the slit by the linear guide device, the carriage including a workpiece mounting table protruding from the housing through the slit; a linear drive device disposed in the housing for moving the carriage axially; a pair of pulleys disposed in an axial end of the housing; and a sealing band mounted around the pulleys within the housing movably for closing the slit, the sealing band including first and second ends which are fastened to first and second ends of the carriage, respectively, to form a circulative loop. Further, the dustproof linear actuator has an air venting device for venting air existing in the housing close to the axial end toward an outside of the housing so that the dustproof linear actuator can remarkably prevents the dust particles from leaking out of the housing by reducing the pressure inside the actuator.

Abstract: A dustproof linear actuator has: a housing with a slit extending axially; a linear guide device disposed in the housing; a carriage mounted in the housing and axially movable along the slit by the linear guide device, the carriage including a workpiece mounting table protruding from the housing through the slit; a linear drive device disposed in the housing for moving the carriage axially; a pair of pulleys disposed in an axial end of the housing; and a sealing band mounted around the pulleys within the housing movably for closing the slit, the sealing band including first and second ends which are fastened to first and second ends of the carriage, respectively, to form a circulative loop. Further, the dustproof linear actuator has an air venting device for venting air existing in the housing close to the axial end toward an outside of the housing so that the dustproof linear actuator can remarkably prevents the dust particles from leaking out of the housing by reducing the pressure inside the actuator.

Abstract: A linear movement table apparatus includes a cylinder tube having an axially extending slit in an upper surface, a screw shaft rotatably supported in the cylinder tube, a feed nut threadedly engaged about the screw shaft, and a table body having an integrally formed piston portion and a table portion. The feed nut is loosely fitted into a nut accommodating space of a half-cylindrical piston portion with minute gaps formed in the feed direction and in the rotational direction. The piston portion has expanding portions expanding outwardly and laterally from both lateral sides. The expanding portions are respectively guided by recessed guide surfaces formed in inner side surfaces of the cylinder tube. Axially extending sliding members are respectively attached to the expanding portions of the piston portion. Each sliding member is a leaf spring made from a synthetic resin.

Abstract: A sample chucking apparatus including a clip provided at a plurality of positions correspondingly to a sample and operating closedly to release and hold the sample, with the clip being acutated by a magnetic force. A spring force counters the direction in which the clip operates, thereby simplifying the structure and ensuring a reliability on fixing or carrying of the sample.

Abstract: This invention is directed to a vacuum processing apparatus which is constructed so that a sample may be carried between a main vacuum chamber and a portion of the atmosphere outside the main vacuum chamber while the sample is retained in a vertical position. The sample is carried in the vertical position through several chambers, including a first vacuum preparatory chamber provided to be communicable with the main vacuum chamber and a second vacuum preparatory chamber provided to be communicable with both the first vacuum preparatory chamber and the atmosphere. By using this apparatus, and in particular by conveying the sample in a vertical position, it is possible to restrain the adhesion of foreign substances on the sample surface which is to be treated. It is also possible to reduce the vacuum load and properly maintain pressure within the main vacuum chamber, thereby enabling increased quality of treatment and also enhancing the manufacturing yield of a semiconductor element.