Abstract: Disclosed is a microwave plasma source including a microwave generator that generates microwaves; a waveguide that propagates the microwaves in a TE mode; a microwave converter including a conversion port that converts a vibration mode of the microwaves guided from the waveguide from the TE mode into a TEM mode, and a coaxial waveguide that propagates the microwaves from the conversion port toward the chamber and converts a remaining TE mode component into the TEM mode during the propagation; a planar antenna including a plurality of slots that radiate the microwaves guided to the coaxial waveguide toward the chamber; and a microwave transmitting plate made of a dielectric material that transmits the microwaves radiated from the plurality of slots of the planar antenna to the chamber. A length of the coaxial waveguide is equal to or longer than a wavelength of the microwaves generated from the microwave generator.

Abstract: A substrate processing system includes a controller that outputs a control signal for controlling a substrate processing apparatus; and a software interlock component that outputs an interlock signal if a predetermined interlock condition is satisfied. In the substrate processing apparatus, a multiple number of devices of the same kind are provided and each device is selected to be either an interlocked state or a non-interlocked state with other devices. The software interlock component outputs an interlock signal to any one of the multiple number of devices of the same kind if it is determined that the multiple number of devices satisfy the predetermined interlock condition. If any one of the multiple number of devices of the same kind receives the interlock signal, the multiple number of devices are interlocked according to an instruction of the interlock signal regardless of an interlocked state or a non-interlocked state of the devices.