Abstract: A polarization inspector for inspecting an inspection target, the polarization inspector having a polarization divider for spatially dividing at least a reflected beam of light from the inspection target by irradiating an illumination beam into divided beams of lights mutually different in polarization direction; one or more optical receivers for receiving the divided beams of lights and generating an image signal based on the divided beams of lights; and a processor for calculating at least one of an elliptical azimuth angle, a polarization degree and a polarization component intensity from the image signal.

Abstract: A polarization inspector for inspecting an inspection target, the polarization inspector having a polarization divider for spatially dividing at least a reflected beam of light from the inspection target by irradiating an illumination beam into divided beams of lights mutually different in polarization direction; one or more optical receivers for receiving the divided beams of lights and generating an image signal based on the divided beams of lights; and a processor for calculating at least one of an elliptical azimuth angle, a polarization degree and a polarization component intensity from the image signal.

Abstract: A conductive foreign material detecting apparatus includes an exciting coil configured to apply an AC magnetic field to a base substance through which the AC magnetic field passes, a magnetic sensor configured to detect a change of the AC magnetic field caused by a conductive foreign material on a surface of the base substance or in the base substance, a noise reduction coil configured to reduce a noise of substantially the same frequency as the AC magnetic field other than the change of the AC magnetic field by generating predetermined magnetic field to the AC magnetic field, and a current controller configured to control a drive current and a phase of the noise reduction coil so as to make the noise of substantially the same frequency as the AC magnetic field other than the change of the AC magnetic field be minimal.