Abstract: A dry etching apparatus for performing dry etching in manufacture of a set of touch screen panels on a mother substrate, including a chamber, an upper electrode in the chamber at an upper portion thereof, the upper electrode configured to apply a high-frequency power source (RF) to the interior of the chamber, a lower electrode in the chamber at a lower portion thereof, the lower electrode configured to apply the high-frequency power source to the interior of the chamber, a gas injection port configured to inject a compound mixture gas into the chamber, an exhaust port configured to exhaust a reactive gas produced in the interior of the chamber, and a shadow mask disposed above a location on the lower electrode for the mother substrate for the touch screen panels, the shadow mask having a plurality of exposure windows respectively corresponding to a plurality of exposure portions to be formed.

Abstract: A dry etching apparatus for performing dry etching in manufacture of a set of touch screen panels on a mother substrate, including a chamber, an upper electrode in the chamber at an upper portion thereof, the upper electrode configured to apply a high-frequency power source (RF) to the interior of the chamber, a lower electrode in the chamber at a lower portion thereof, the lower electrode configured to apply the high-frequency power source to the interior of the chamber, a gas injection port configured to inject a compound mixture gas into the chamber, an exhaust port configured to exhaust a reactive gas produced in the interior of the chamber, and a shadow mask disposed above a location on the lower electrode for the mother substrate for the touch screen panels, the shadow mask having a plurality of exposure windows respectively corresponding to a plurality of exposure portions to be formed.

Abstract: A touch screen panel includes a transparent substrate divided into a display area and a non-display area, the non-display area being outside the display area, first sensing cells disposed in one row with a same X-coordinate in the display area, the first sensing cells having a double-layered structure including first and second sensing cell parts overlapping each other, a connection portion between adjacent first sensing cells, second sensing cells disposed in one column with a same Y-coordinate in the display area, the second sensing cells having a double-layered structure including third and fourth sensing cell parts overlapping each other, a connection pattern between adjacent second sensing cells, the connection pattern intersecting and overlapping the connection portion, and an island-shaped insulating layer between the connection portion and the connection pattern.

Abstract: A touch screen panel includes a transparent substrate divided into a display area and a non-display area, the non-display area being outside the display area, first sensing cells disposed in one row with a same X-coordinate in the display area, the first sensing cells having a double-layered structure including first and second sensing cell parts overlapping each other, a connection portion between adjacent first sensing cells, second sensing cells disposed in one column with a same Y-coordinate in the display area, the second sensing cells having a double-layered structure including third and fourth sensing cell parts overlapping each other, a connection pattern between adjacent second sensing cells, the connection pattern intersecting and overlapping the connection portion, and an island-shaped insulating layer between the connection portion and the connection pattern.

Abstract: A dry etching apparatus for performing dry etching in manufacture of a set of touch screen panels on a mother substrate, including a chamber, an upper electrode in the chamber at an upper portion thereof, the upper electrode configured to apply a high-frequency power source (RF) to the interior of the chamber, a lower electrode in the chamber at a lower portion thereof, the lower electrode configured to apply the high-frequency power source to the interior of the chamber, a gas injection port configured to inject a compound mixture gas into the chamber, an exhaust port configured to exhaust a reactive gas produced in the interior of the chamber, and a shadow mask disposed above a location on the lower electrode for the mother substrate for the touch screen panels, the shadow mask having a plurality of exposure windows respectively corresponding to a plurality of exposure portions to be formed.