Patents by Inventor Span Lu

Span Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for process contamination prevention for semiconductor manufacturing
    Patent number: 7035705
    Abstract: Provided are a system and method for preventing contamination in a semiconductor manufacturing environment. The method includes comparing one or more attributes associated with a product, such as a substrate, with one or more attributes associated with an operation. If the comparison indicates that the product is not compatible with the operation, then the operation is suspended with respect to the product. If the comparison indicates that the product is compatible with the operation, then the operation is performed on the product.
    Type: Grant
    Filed: March 3, 2004
    Date of Patent: April 25, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Hsu, Span Lu, Kuang-Huan Hsu, Chen-Yung Lin, Shui-Tien Lin, Chun-Hung Lin
  • System and method for process contamination prevention for semiconductor manufacturing
    Publication number: 20050197730
    Abstract: Provided are a system and method for preventing contamination in a semiconductor manufacturing environment. The method includes comparing one or more attributes associated with a product, such as a substrate, with one or more attributes associated with an operation. If the comparison indicates that the product is not compatible with the operation, then the operation is suspended with respect to the product. If the comparison indicates that the product is compatible with the operation, then the operation is performed on the product.
    Type: Application
    Filed: March 3, 2004
    Publication date: September 8, 2005
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Wei Hsu, Span Lu, Kuang-Huan Hsu, Chen-Yung Lin, Shui-Tien Lin, Chun-Hung Lin
  • Method for controlling queue time constraints in a fabrication facility
    Patent number: 6647307
    Abstract: An algorithm can be performed to control the dispatch of products in a fabrication or manufacturing facility. The queue time constraint tolerances and tool throughput are initialized for each product. Next the multiple processing demand time can be calculated for each product. The aggregating queue time constraint can then be calculated for each product. If the multiple processing demand time is less than the aggregating queue time constraint for each queue time limit tool, then any lot can be selected to be processed. Otherwise, the product at the given tool should be further processed.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: November 11, 2003
    Assignee: Taiwan Semiconductor Mfg. Co. Ltd.
    Inventors: Liang-Kai Huang, Span Lu, Ren-Chyi You, Kuang-Huan Hsu