Abstract: The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation.

Abstract: An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

Abstract: The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation.

Abstract: An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

Abstract: An isolation means used in conjunction with supplying energy to a laser, which isolates a power supply from the pulser circuit, and commutates a switch which activates the discharge of energy to the laser.

Abstract: A pulser with solid dielectrics including a pulse compressor and pulse transformer apparatus, which is able to produce short bursts of electrical energy at high voltage utilizing a coaxial structure. Both the transformer and the compressor utilize ferromagnetic cores having an inner and an outer diameter, and isolating members of similar geometry. The cores and ceramic members are held in place using conducting plates and bus bars. The overall structure of the compressor and the transformer is built around a central axis.

Abstract: An isolation means used in conjunction with supplying energy to a laser, which isolates a power supply from the pulser circuit, and commutates a switch which activates the discharge of energy to the laser.

Abstract: In a pulsed laser which is periodically energized so that it emits a pulse of radiation following each periodic energization, a feedback loop control system is provided for controlling energization of the laser so that the laser output radiation pulses are substantially constant over a relatively long period of operation, the feedback loop including a detector for detecting the laser pulses and producing an electrical signal representative of each pulse and a comparing circuit responsive to those electrical signals and a reference signal that represents the constant laser output level desired, for comparing the electric signals and the reference signals producing a control signal for controlling the energy of the periodic energization.