Patents by Inventor SPM TECHNOLOGY, INC.

SPM TECHNOLOGY, INC. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130165028
    Abstract: An improved retaining ring used for chemical mechanical polishing of substrates, such as semiconductor wafers, to hold a substrate in place during the polishing process. The retaining rings are configured with inserts through which fasteners are positioned to securely affix the retaining ring to the polishing head. The inserts assist in dissipating the force of the fasteners, thereby allowing a more uniform polishing surface. The opening through which the fastener is positioned may be configured with concave or convex side walls to assist in dissipating the force of the fasteners during installation of the retaining ring or the polishing process.
    Type: Application
    Filed: February 19, 2013
    Publication date: June 27, 2013
    Applicant: SPM TECHNOLOGY, INC.
    Inventor: SPM TECHNOLOGY, INC.