Patents by Inventor Sreekrishnan Sankaranarayanan

Sreekrishnan Sankaranarayanan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring a flow distribution of an energized gas
    Publication number: 20060093730
    Abstract: A method of detecting a property of an energized gas in a process chamber involves providing a substrate having a hydride precursor in the chamber. The substrate is exposed to an energized gas comprising hydrogen in the chamber to form a hydride compound in the precursor layer. A sheet resistance of the layer is measured to determine the property of the energized gas, such as at least one of the processing uniformity and cleaning ability of the energized gas. One or more process parameters can be selected in relation to the measured sheet resistance to improve the energized gas processing uniformity and cleaning ability.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: See-Eng Phan, Ralf Hofmann, Tong Zhang, Yehuda Demayo, Sreekrishnan Sankaranarayanan, Chiukin Lai