Patents by Inventor Sridhar Balakrishnan

Sridhar Balakrishnan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230281429
    Abstract: Existing machine learning systems require historical data to perform analytics to detect faults in a machine and are unable to detect new types of faults/changes occurring in real time. These systems further fail to identify operation changes due to sensor drift and forget past events that have occurred. Present application provides systems and methods for identifying and classifying sensor drifts and diverse varying operational conditions from continually received sensor data using continual training of variational autoencoders (VAE) following drift specific characteristics, wherein sensor drift is compensated based on identified changes in sensors and degradation in machine(s).
    Type: Application
    Filed: January 5, 2023
    Publication date: September 7, 2023
    Applicant: Tata Consultancy Services Limited
    Inventors: Soma Bandyopadhyay, Sridhar Balakrishnan, Shruti Sachan, Yasasvy Tadepalli, Arpan Pal, Anish Datta, Karthik Leburi, Srinivas Raghu Raman Gadepally
  • Publication number: 20220059484
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Application
    Filed: November 4, 2021
    Publication date: February 24, 2022
    Inventors: Valery M. DUBIN, Sridhar BALAKRISHNAN, Mark BOHR
  • Patent number: 11201129
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: December 14, 2021
    Assignee: Intel Corporation
    Inventors: Valery M. Dubin, Sridhar Balakrishnan, Mark Bohr
  • Publication number: 20190198472
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Application
    Filed: February 22, 2019
    Publication date: June 27, 2019
    Inventors: Valery M. DUBIN, Sridhar BALAKRISHNAN, Mark BOHR
  • Patent number: 10249588
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: April 2, 2019
    Assignee: Intel Corporation
    Inventors: Valery M. Dubin, Sridhar Balakrishnan, Mark Bohr
  • Publication number: 20170084564
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Application
    Filed: December 5, 2016
    Publication date: March 23, 2017
    Inventors: Valery M. DUBIN, Sridhar BALAKRISHNAN, Mark BOHR
  • Patent number: 9543261
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Grant
    Filed: December 20, 2010
    Date of Patent: January 10, 2017
    Assignee: Intel Corporation
    Inventors: Valery M. Dubin, Sridhar Balakrishnan, Mark Bohr
  • Publication number: 20160307796
    Abstract: Processes of forming an insulated wire into an interlayer dielectric layer (ILD) of a back-end metallization includes thermally treating a metallic barrier precursor under conditions to cause at least one alloying element in the barrier precursor to form a dielectric barrier between the wire and the ILD. The dielectric barrier is therefore a self-forming, self-aligned barrier. Thermal processing is done under conditions to cause the at least one alloying element to migrate from a zone of higher concentration thereof to a zone of lower concentration thereof to further form the dielectric barrier. Various apparatus are made by the process.
    Type: Application
    Filed: June 24, 2016
    Publication date: October 20, 2016
    Inventors: Hui Jae Yoo, Jeffery D. Bielefeld, Sean W. King, Sridhar Balakrishnan
  • Patent number: 9461010
    Abstract: The present subject matter relates to the field of fabricating microelectronic devices. In at least one embodiment, the present subject matter relates to forming an interconnect that has a portion thereof which becomes debonded from the microelectronic device during cooling after attachment to an external device. The debonded portion allows the interconnect to flex and absorb stress.
    Type: Grant
    Filed: January 18, 2016
    Date of Patent: October 4, 2016
    Assignee: Intel Corporation
    Inventors: Qing Ma, Jun He, Patrick Morrow, Paul B. Fischer, Sridhar Balakrishnan, Satish Radhakrishnan, Tatyana Andryushchenko, Guanghai Xu
  • Publication number: 20160133596
    Abstract: The present subject matter relates to the field of fabricating microelectronic devices. In at least one embodiment, the present subject matter relates to forming an interconnect that has a portion thereof which becomes debonded from the microelectronic device during cooling after attachment to an external device. The debonded portion allows the interconnect to flex and absorb stress.
    Type: Application
    Filed: January 18, 2016
    Publication date: May 12, 2016
    Applicant: Intel Corporation
    Inventors: Qing Ma, Jun He, Patrick Morrow, Paul B. Fischer, Sridhar Balakrishnan, Satish Radhakrishnan, Tatyana Andryushchenko, Guanghai Xu
  • Patent number: 9269686
    Abstract: The present subject matter relates to the field of fabricating microelectronic devices. In at least one embodiment, the present subject matter relates to forming an interconnect that has a portion thereof which becomes debonded from the microelectronic device during cooling after attachment to an external device. The debonded portion allows the interconnect to flex and absorb stress.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: February 23, 2016
    Assignee: Intel Corporation
    Inventors: Qing Ma, Jun He, Patrick Morrow, Paul B. Fischer, Sridhar Balakrishnan, Satish Radhakrishnan, Tatyana T. Adryushchenko, Guanghai Xu
  • Publication number: 20140106560
    Abstract: The present subject matter relates to the field of fabricating microelectronic devices. In at least one embodiment, the present subject matter relates to forming an interconnect that has a portion thereof which becomes debonded from the microelectronic device during cooling after attachment to an external device. The debonded portion allows the interconnect to flex and absorb stress.
    Type: Application
    Filed: December 18, 2013
    Publication date: April 17, 2014
    Inventors: Qing Ma, Jun He, Patrick Morrow, Paul B. Fischer, Sridhar Balakrishnan, Satish Radhakrishnan, Tatyana Tanya Andryushcheko, Guanghai Xu
  • Patent number: 8637778
    Abstract: The present subject matter relates to the field of fabricating microelectronic devices. In at least one embodiment, the present subject matter relates to forming an interconnect that has a portion thereof which becomes debonded from the microelectronic device during cooling after attachment to an external device. The debonded portion allows the interconnect to flex and absorb stress.
    Type: Grant
    Filed: April 8, 2010
    Date of Patent: January 28, 2014
    Assignee: Intel Corporation
    Inventors: Qing Ma, Jun He, Patrick Morrow, Paul B. Fischer, Sridhar Balakrishnan, Satish Radhakrishnan, Tatyana Tanya Andryushchenko, Guanghai Xu
  • Patent number: 8580679
    Abstract: Methods, techniques, and structures relating to die packaging. In one exemplary implementation, a die package interconnect structure includes a semiconductor substrate and a first conducting layer in contact with the semiconductor substrate. The first conducting layer may include a base layer metal. The base layer metal may include Cu. The exemplary implementation may also include a diffusion barrier in contact with the first conducting layer and a wetting layer on top of the diffusion barrier. A bump layer may reside on top of the wetting layer, in which the bump layer may include Sn, and Sn may be electroplated. The diffusion barrier may be electroless and may be adapted to prevent Cu and Sn from diffusing through the diffusion barrier. Furthermore, the diffusion barrier may be further adapted to suppress a whisker-type formation in the bump layer.
    Type: Grant
    Filed: August 20, 2007
    Date of Patent: November 12, 2013
    Assignee: Intel Corporation
    Inventors: Valery M. Dubin, Sridhar Balakrishnan, Mark Bohr
  • Publication number: 20130260553
    Abstract: Processes of forming an insulated wire into an interlayer dielectric layer (ILD) of a back-end metallization includes thermally treating a metallic barrier precursor under conditions to cause at least one alloying element in the barrier precursor to form a dielectric barrier between the wire and the ILD. The dielectric barrier is therefore a self-forming, self-aligned barrier. Thermal processing is done under conditions to cause the at least one alloying element to migrate from a zone of higher concentration thereof to a zone of lower concentration thereof to further form the dielectric barrier. Various apparatus are made by the process.
    Type: Application
    Filed: May 13, 2013
    Publication date: October 3, 2013
    Inventors: Hui Jae Yoo, Jeffrey D. Bielefeld, Sean W. King, Sridhar Balakrishnan
  • Patent number: 8508018
    Abstract: Methods for fabricating integrated circuit electrical interconnects and electrical interconnects are provided. Methods include providing a substrate having a surface, the surface having a feature formed therein wherein the feature is a trench or via, depositing a metal layer, the metal of the metal layer being selected from the group consisting of Ru, Co, Pt, Ir, Pd, Re, and Rh, onto surfaces of the feature, depositing a copper seed layer wherein the copper seed layer comprises a dopant and the dopant is selected from the group consisting of Mn, Mg, MgB2. P, B, Al, Co and combinations thereof, onto the metal layer, and depositing copper into the feature. Devices comprising copper interconnects having metal liner layers are provided. Devices having liner layers comprising ruthenium are provided.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: August 13, 2013
    Assignee: Intel Corporation
    Inventors: Rohan N. Akolkar, Sridhar Balakrishnan, James S. Clarke, Christopher J. Jezewski, Philip Yashar
  • Patent number: 8461683
    Abstract: Processes of forming an insulated wire into an interlayer dielectric layer (ILD) of a back-end metallization includes thermally treating a metallic barrier precursor under conditions to cause at least one alloying element in the barrier precursor to form a dielectric barrier between the wire and the ILD. The dielectric barrier is therefore a self-forming, self-aligned barrier. Thermal processing is done under conditions to cause the at least one alloying element to migrate from a zone of higher concentration thereof to a zone of lower concentration thereof to further form the dielectric barrier. Various apparatus are made by the process.
    Type: Grant
    Filed: April 1, 2011
    Date of Patent: June 11, 2013
    Assignee: Intel Corporation
    Inventors: Hui Jae Yoo, Jeffery D. Bielefeld, Sean W. King, Sridhar Balakrishnan
  • Publication number: 20120248608
    Abstract: Processes of forming an insulated wire into an interlayer dielectric layer (ILD) of a back-end metallization includes thermally treating a metallic barrier precursor under conditions to cause at least one alloying element in the barrier precursor to form a dielectric barrier between the wire and the ILD. The dielectric barrier is therefore a self-forming, self-aligned barrier. Thermal processing is done under conditions to cause the at least one alloying element to migrate from a zone of higher concentration thereof to a zone of lower concentration thereof to further form the dielectric barrier. Various apparatus are made by the process.
    Type: Application
    Filed: April 1, 2011
    Publication date: October 4, 2012
    Inventors: Hui Jae Yoo, Jeffery D. Bielefeld, Sean W. King, Sridhar Balakrishnan
  • Publication number: 20120077053
    Abstract: Methods for fabricating integrated circuit electrical interconnects and electrical interconnects are provided. Methods include providing a substrate having a surface, the surface having a feature formed therein wherein the feature is a trench or via, depositing a metal layer, the metal of the metal layer being selected from the group consisting of Ru, Co, Pt, Ir, Pd, Re, and Rh, onto surfaces of the feature, depositing a copper seed layer wherein the copper seed layer comprises a dopant and the dopant is selected from the group consisting of Mn, Mg, MgB2. P, B, Al, Co and combinations thereof, onto the metal layer, and depositing copper into the feature. Devices comprising copper interconnects having metal liner layers are provided. Devices having liner layers comprising ruthenium are provided.
    Type: Application
    Filed: September 24, 2010
    Publication date: March 29, 2012
    Inventors: Rohan N. Akolkar, Sridhar Balakrishnan, James S. Clarke, Christopher J. Jezewski, Philip Yashar
  • Publication number: 20110247872
    Abstract: The present subject matter relates to the field of fabricating microelectronic devices. In at least one embodiment, the present subject matter relates to forming an interconnect that has a portion thereof which becomes debonded from the microelectronic device during cooling after attachment to an external device. The debonded portion allows the interconnect to flex and absorb stress.
    Type: Application
    Filed: April 8, 2010
    Publication date: October 13, 2011
    Inventors: Qing Ma, Jun He, Patrick Morrow, Paul B. Fischer, Sridhar Balakrishnan, Satish Radhakrishnan, Tatyana Tanya Andryushchenko, Guanghai Xu