Patents by Inventor Sridhar KUCHIBHATLA

Sridhar KUCHIBHATLA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Replacement low-K spacer
    Patent number: 9129987
    Abstract: A method includes providing a gate structure having a gate, a first spacer along at least one side of the gate and an interlayer dielectric on at least one of the gate and the first spacer. The interlayer dielectric is removed to reveal the first spacer. The first spacer is removed and a second spacer is deposited on at least one side of the gate. The second spacer is formed of material having a lower dielectric constant than the first spacer.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: September 8, 2015
    Assignee: GLOBAL FOUNDRIES, Inc.
    Inventors: Jing Wan, Jin Ping Liu, Guillaume Bouche, Andy Wei, Lakshmanan H. Vanamurthy, Cuiqin Xu, Sridhar Kuchibhatla, Rama Kambhampati, Xiuyu Cai
  • REPLACEMENT LOW-K SPACER
    Publication number: 20150214330
    Abstract: A method includes providing a gate structure having a gate, a first spacer along at least one side of the gate and an interlayer dielectric on at least one of the gate and the first spacer. The interlayer dielectric is removed to reveal the first spacer. The first spacer is removed and a second spacer is deposited on at least one side of the gate. The second spacer is formed of material having a lower dielectric constant than the first spacer.
    Type: Application
    Filed: January 24, 2014
    Publication date: July 30, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Jing WAN, Jin Ping LIU, Guillaume BOUCHE, Andy WEI, Lakshmanan H. VANAMURTHY, Cuiqin XU, Sridhar KUCHIBHATLA, Rama KAMBHAMPATI, Xiuyu CAI