Patents by Inventor Sridhar Ramaprasad Prasad

Sridhar Ramaprasad Prasad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCH RESISTANT HEATER AND ASSEMBLY THEREOF
    Publication number: 20070181065
    Abstract: An etch resistant heater for use in a wafer processing assembly with an excellent ramp rate of at least 20° C. per minute. The heater is coated with a protective overcoating layer allowing the heater to have a radiation efficiency above 70% at elevated heater temperatures of >1500° C., and an etch rate in NF3 at 600° C. of less than 100 A/min.
    Type: Application
    Filed: October 18, 2006
    Publication date: August 9, 2007
    Applicant: General Electric Company
    Inventors: Akinobu Otaka, Takeshi Higuchi, Sridhar Ramaprasad Prasad, Wei Fan, Marc Schaepkens, Douglas A. Longworth