Patents by Inventor Sridhar S. Govindaraju

Sridhar S. Govindaraju has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ANNEALING A SACRIFICIAL LAYER
    Publication number: 20140011373
    Abstract: Methods for semiconductor processing include annealing a sacrificial material to change a characteristic of the sacrificial material. Changes may include reducing line edge roughness, changing density, changing surface chemistry, or changing a dimension of patterns of the sacrificial material. At least one additional process may be included to change a layer positioned below the sacrificial material before removing all, or substantially all, of the sacrificial material.
    Type: Application
    Filed: December 28, 2011
    Publication date: January 9, 2014
    Inventors: Aravind Killampalli, Charles H. Wallace, Sridhar S. Govindaraju