Patents by Inventor Srikanth Balaji Samavedam
Srikanth Balaji Samavedam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11462648Abstract: One illustrative Schottky diode disclosed herein includes a semiconductor substrate, an anode region and a cathode region. The anode region includes a plurality of first fins with a first vertical height formed in the anode region, wherein an upper surface of the semiconductor substrate is exposed within the anode region. The cathode region includes a plurality of second fins with a second vertical height that is greater than the first vertical height. The device also includes a conductive structure that contacts and engages at least an upper surface of the plurality of first fins in the anode region.Type: GrantFiled: December 5, 2019Date of Patent: October 4, 2022Assignee: GlobalFoundries U.S. Inc.Inventors: Jagar Singh, Srikanth Balaji Samavedam
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Patent number: 11195947Abstract: A semiconductor device is disclosed including a semiconductor layer, a first well doped with dopants of a first conductivity type defined in the semiconductor layer, a second well doped with dopants of a second conductivity type different than the first conductivity type defined in the semiconductor layer adjacent the first well to define a PN junction between the first and second wells, and an isolation structure positioned in the second well. The semiconductor device also includes a first source/drain region positioned in the first well, a second source/drain region positioned in the second well adjacent a first side of the isolation structure, a doped region positioned in the second well adjacent a second side of the isolation structure, and a gate structure positioned above the semiconductor layer, wherein the gate structure vertically overlaps a portion of the doped region.Type: GrantFiled: October 24, 2019Date of Patent: December 7, 2021Assignee: GlobalFoundries U.S. Inc.Inventors: Jagar Singh, Luigi Pantisano, Anvitha Shampur, Frank Scott Johnson, Srikanth Balaji Samavedam
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Patent number: 11127818Abstract: An illustrative device includes a transistor including a first set of fins defined above a substrate, a second set of fins defined above the substrate, and a gate structure embedded in the substrate between the first set of fins and the second set of fins, wherein the first set of fins and the second set of fins are doped with a first dopant type and the substrate is doped with a second dopant type different than the first dopant type.Type: GrantFiled: July 30, 2019Date of Patent: September 21, 2021Assignee: GlobalFoundries U.S. Inc.Inventors: Jagar Singh, Srikanth Balaji Samavedam
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Publication number: 20210175370Abstract: One illustrative Schottky diode disclosed herein includes a semiconductor substrate, an anode region and a cathode region. The anode region includes a plurality of first fins with a first vertical height formed in the anode region, wherein an upper surface of the semiconductor substrate is exposed within the anode region. The cathode region includes a plurality of second fins with a second vertical height that is greater than the first vertical height. The device also includes a conductive structure that contacts and engages at least an upper surface of the plurality of first fins in the anode region.Type: ApplicationFiled: December 5, 2019Publication date: June 10, 2021Inventors: Jagar Singh, Srikanth Balaji Samavedam
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Publication number: 20210126126Abstract: A semiconductor device is disclosed including a semiconductor layer, a first well doped with dopants of a first conductivity type defined in the semiconductor layer, a second well doped with dopants of a second conductivity type different than the first conductivity type defined in the semiconductor layer adjacent the first well to define a PN junction between the first and second wells, and an isolation structure positioned in the second well. The semiconductor device also includes a first source/drain region positioned in the first well, a second source/drain region positioned in the second well adjacent a first side of the isolation structure, a doped region positioned in the second well adjacent a second side of the isolation structure, and a gate structure positioned above the semiconductor layer, wherein the gate structure vertically overlaps a portion of the doped region.Type: ApplicationFiled: October 24, 2019Publication date: April 29, 2021Inventors: Jagar Singh, Luigi Pantisano, Anvitha Shampur, Frank Scott Johnson, Srikanth Balaji Samavedam
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Publication number: 20210036108Abstract: An illustrative device includes a transistor including a first set of fins defined above a substrate, a second set of fins defined above the substrate, and a gate structure embedded in the substrate between the first set of fins and the second set of fins, wherein the first set of fins and the second set of fins are doped with a first dopant type and the substrate is doped with a second dopant type different than the first dopant type.Type: ApplicationFiled: July 30, 2019Publication date: February 4, 2021Inventors: Jagar Singh, Srikanth Balaji Samavedam
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Publication number: 20200273953Abstract: One illustrative integrated circuit product disclosed herein includes a short-channel transistor device and a long-channel transistor device formed above a semiconductor substrate, wherein a first gate structure for the short-channel transistor device includes a short-channel WFM layer with a first upper surface that is positioned at a first distance above an upper surface of the semiconductor substrate, and wherein a second gate structure for the long-channel transistor device includes a long-channel WFM layer with a second upper surface that is positioned at a second distance above the upper surface of the semiconductor substrate, wherein the first distance is greater than the second distance.Type: ApplicationFiled: February 27, 2019Publication date: August 27, 2020Inventors: Tao Chu, Wei Ma, Jae Gon Lee, Hong Yu, Zhenyu Hu, Srikanth Balaji Samavedam
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Patent number: 10644157Abstract: Disclosed are methods of forming a semiconductor structure including a bulk semiconductor substrate and, on the substrate, a fin-type field effect transistor (FINFET) with a uniform channel length and a below-channel buried insulator. In the methods, a semiconductor fin is formed with a sacrificial semiconductor layer between lower and upper semiconductor layers. During processing, the sacrificial semiconductor layer is replaced with dielectric spacer material (i.e., a buried insulator). The buried insulator functions as an etch stop layer when etching source/drain recesses, ensuring that they have vertical sidewalls and, thereby ensuring that the channel region has a uniform length. The buried insulator also provides isolation between channel region and the substrate below and prevents dopant diffusion into the channel region from a punch-through stopper (if present). Optionally, the buried insulator is formed so as to contain an air-gap. Also disclosed are structures resulting from the methods.Type: GrantFiled: July 31, 2018Date of Patent: May 5, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Julien Frougier, Ruilong Xie, Andreas Knorr, Srikanth Balaji Samavedam
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Publication number: 20200044069Abstract: Disclosed are methods of forming a semiconductor structure including a bulk semiconductor substrate and, on the substrate, a fin-type field effect transistor (FINFET) with a uniform channel length and a below-channel buried insulator. In the methods, a semiconductor fin is formed with a sacrificial semiconductor layer between lower and upper semiconductor layers. During processing, the sacrificial semiconductor layer is replaced with dielectric spacer material (i.e., a buried insulator). The buried insulator functions as an etch stop layer when etching source/drain recesses, ensuring that they have vertical sidewalls and, thereby ensuring that the channel region has a uniform length. The buried insulator also provides isolation between channel region and the substrate below and prevents dopant diffusion into the channel region from a punch-through stopper (if present). Optionally, the buried insulator is formed so as to contain an air-gap. Also disclosed are structures resulting from the methods.Type: ApplicationFiled: July 31, 2018Publication date: February 6, 2020Applicant: GLOBALFOUNDRIES INC.Inventors: Julien Frougier, Ruilong Xie, Andreas Knorr, Srikanth Balaji Samavedam
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Patent number: 10483172Abstract: A device includes a substrate having an N-active region and a P-active region, a layer of silicon-carbon positioned on an upper surface of the N-active region, a first layer of a first semiconductor material positioned on the layer of silicon-carbon, a second layer of the first semiconductor material positioned on an upper surface of the P-active region, and a layer of a second semiconductor material positioned on the second layer of the first semiconductor material. An N-type transistor is positioned in and above the N-active region and a P-type transistor is positioned in and above the P-active region.Type: GrantFiled: October 24, 2017Date of Patent: November 19, 2019Assignee: GLOBALFOUNDRIES Inc.Inventors: Vara G. Reddy Vakada, Laegu Kang, Michael Ganz, Yi Qi, Puneet Khanna, Srikanth Balaji Samavedam, Sri Charan Vemula, Manfred Eller
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Patent number: 10347748Abstract: One illustrative method disclosed herein includes, among other things, forming a fin in a semiconductor substrate, forming a gate structure around the fin and, after forming the gate structure, forming a final source/drain cavity in the fin, wherein the source/drain cavity includes an upper innermost edge and a lower innermost edge, both of which extend laterally under at least a portion of the gate structure, and wherein the lower innermost edge extends laterally further under the gate structure than does the upper innermost edge. The method also includes performing an epitaxial growth process to form an epi semiconductor material in the final source/drain cavity.Type: GrantFiled: April 6, 2016Date of Patent: July 9, 2019Assignee: GLOBALFOUNDRIES Inc.Inventors: Shesh Mani Pandey, Muhammad Rahman, Srikanth Balaji Samavedam
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Publication number: 20180337033Abstract: Devices and methods of fabricating devices are provided. One method includes: patterning an isolation gate disposed above a trench, the trench extending into a substrate; patterning a gate structure disposed above the substrate and adjacent the isolation gate; depositing a set of sidewall spacers on either side of the isolation gate and gate structure; etching a set of cavities between the isolation gate and gate structure and extending into the substrate; and epitaxially growing a set of epitaxial growths in the set of cavities, wherein the isolation gate is wider than the gate structure, and wherein epitaxial growths adjacent the isolation gate substantially conform to an oxide layer between the isolation gate and the trench, contacting at least a portion of a bottom surface and at least a portion of a side surface of the oxide layer.Type: ApplicationFiled: May 16, 2017Publication date: November 22, 2018Applicant: GLOBALFOUNDRIES Inc.Inventors: Shesh Mani PANDEY, Srikanth Balaji SAMAVEDAM, Jui-Hsuan FENG
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Publication number: 20180233415Abstract: A method for producing a finFET having a fin with thinned sidewalls on a lower portion above a shallow trench isolation (STI) regions is provided. Embodiments include forming a fin surrounded by STI regions on a substrate; recessing the STI regions, revealing an upper portion of the fin; forming a spacer over side and upper surfaces of the upper portion of the fin; recessing the STI regions, exposing a lower portion of the fin; and thinning sidewalls of the lower portion of the fin.Type: ApplicationFiled: April 6, 2018Publication date: August 16, 2018Inventors: Shesh Mani PANDEY, Baofu ZHU, Srikanth Balaji SAMAVEDAM
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Patent number: 9966313Abstract: A method for producing a finFET having a fin with thinned sidewalls on a lower portion above a shallow trench isolation (STI) regions is provided. Embodiments include forming a fin surrounded by STI regions on a substrate; recessing the STI regions, revealing an upper portion of the fin; forming a spacer over side and upper surfaces of the upper portion of the fin; recessing the STI regions, exposing a lower portion of the fin; and thinning sidewalls of the lower portion of the fin.Type: GrantFiled: August 5, 2016Date of Patent: May 8, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Shesh Mani Pandey, Baofu Zhu, Srikanth Balaji Samavedam
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Patent number: 9935112Abstract: A static random access memory (SRAM) cell includes 1st and 2nd fins disposed on a substrate. A 1st pass gate transistor (1st PG) is embedded in the 1st fin. The 1st PG has a source region and a drain region disposed over the 1st and 2nd fins. A 1st gate structure (1st PG-G) is disposed over the 1st fin and between the source and drain regions. The 1st PG-G is electrically connected to a 1st word line. A 2nd pass gate transistor (2nd PG) is embedded in the 2nd fin. The 2nd PG has the same source and drain regions. A 2nd gate structure (2nd PG-G) is disposed over the 2nd fin and between the source and drain regions. The 2nd PG-G is electrically connected to a 2nd word line. A 1st CT pillar is disposed between the 1st PG-G and 2nd PG-G.Type: GrantFiled: May 19, 2017Date of Patent: April 3, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Hui Zang, Srikanth Balaji Samavedam
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Publication number: 20180047641Abstract: A device includes a substrate having an N-active region and a P-active region, a layer of silicon-carbon positioned on an upper surface of the N-active region, a first layer of a first semiconductor material positioned on the layer of silicon-carbon, a second layer of the first semiconductor material positioned on an upper surface of the P-active region, and a layer of a second semiconductor material positioned on the second layer of the first semiconductor material. An N-type transistor is positioned in and above the N-active region and a P-type transistor is positioned in and above the P-active region.Type: ApplicationFiled: October 24, 2017Publication date: February 15, 2018Inventors: Vara G. Reddy Vakada, Laegu Kang, Michael Ganz, Yi Qi, Puneet Khanna, Srikanth Balaji Samavedam, Sri Charan Vemula, Manfred Eller
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Publication number: 20180040516Abstract: A method for producing a finFET having a fin with thinned sidewalls on a lower portion above a shallow trench isolation (STI) regions is provided. Embodiments include forming a fin surrounded by STI regions on a substrate; recessing the STI regions, revealing an upper portion of the fin; forming a spacer over side and upper surfaces of the upper portion of the fin; recessing the STI regions, exposing a lower portion of the fin; and thinning sidewalls of the lower portion of the fin.Type: ApplicationFiled: August 5, 2016Publication date: February 8, 2018Inventors: Shesh Mani PANDEY, Baofu ZHU, Srikanth Balaji SAMAVEDAM
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Patent number: 9852954Abstract: One illustrative method disclosed herein includes performing a first plurality of epitaxial deposition processes to form a first plurality of semiconductor materials selectively above the N-active region while masking the P-active region, performing a second plurality of epitaxial deposition processes to form a second plurality of semiconductor materials selectively above the P-active region while masking the N-active region, forming an N-type transistor in and above the N-active region and forming a P-type transistor in and above the P-active region.Type: GrantFiled: October 14, 2015Date of Patent: December 26, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Vara G. Reddy Vakada, Laegu Kang, Michael Ganz, Yi Qi, Puneet Khanna, Srikanth Balaji Samavedam, Sri Charan Vemula, Manfred Eller
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Publication number: 20170294522Abstract: One illustrative method disclosed herein includes, among other things, forming a fin in a semiconductor substrate, forming a gate structure around the fin and, after forming the gate structure, forming a final source/drain cavity in the fin, wherein the source/drain cavity comprises an upper innermost edge and a lower innermost edge, both of which extend laterally under at least a portion of the gate structure, and wherein the lower innermost edge extends laterally further under the gate structure than does the upper innermost edge.Type: ApplicationFiled: April 6, 2016Publication date: October 12, 2017Inventors: Shesh Mani Pandey, Muhammad Rahman, Srikanth Balaji Samavedam
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Patent number: 9576952Abstract: Integrated circuits and fabrication methods are provided. The integrated circuit includes: a varying gate structure disposed over a substrate structure, the varying gate structure including a first gate stack in a first region of the substrate structure, and a second gate stack in a second region of the substrate structure; a first field-effect transistor in the first region, the first field-effect transistor including the first gate stack and having a first threshold voltage; and a second field-effect transistor in the second region, the second field-effect transistor including the second gate stack and having a second threshold voltage, where the first threshold voltage is different from the second threshold voltage. The methods include providing the varying gate structure, the providing including: sizing layer(s) of the varying gate structure with different thickness(es) in different region(s).Type: GrantFiled: February 25, 2014Date of Patent: February 21, 2017Assignee: GLOBALFOUNDRIES INC.Inventors: Manoj Joshi, Manfred Eller, Richard J. Carter, Srikanth Balaji Samavedam