Patents by Inventor Srikanth M. Perungulam

Srikanth M. Perungulam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Focused ion beam endpoint detection using charge pulse detection electronics
    Patent number: 6911832
    Abstract: A system and method for detecting a milling endpoint on a semiconductor sample by directing an ion beam from a focused ion beam (FIB) apparatus at the sample and using charge pulse detection electronics (CPDE) components to generate a distribution curve on a histogram display. A preferred configuration of the CPDE components includes a charge preamplifier, a pulse amplifier, a pulse shaper, and a multichannel analyzer (MCA).
    Type: Grant
    Filed: July 16, 2003
    Date of Patent: June 28, 2005
    Assignee: Texas Instruments Incorporated
    Inventors: Sivaramakrishna Kolachina, Srikanth M. Perungulam