Patents by Inventor Srini Vedula

Srini Vedula has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of stabilizing measurement of ArF resist in CD-SEM
    Patent number: 7015468
    Abstract: A method of improving stability for CD-SEM measurements of photoresist, in particular 193 nm photoresist, and of reducing shrinkage of 193 nm photoresist during CD-SEM measurements. The photoresist is exposed to a dose of electrons or other stabilizing beam prior to or during CD measurement. One embodiment of the invention includes multiplexing of the SEM electron beam.
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: March 21, 2006
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Amir Azordegan, Gian Francesco Lorusso, Ananthanarayanan Mohan, Mark Neil, Waiman Ng, Srini Vedula