Abstract: A method and apparatus for performing post-exposure bake operations is described herein. After exposure of photoresist on a substrate, the substrate is heated during a baking process to facilitate protection of the resist. The baking process is performed in a vacuum environment at sub-atmospheric pressures. After baking at reduced pressure, the substrate is cooled. The cooling process is performed at sub-atmospheric pressures. Further development of the resist is performed at ambient pressures.

Abstract: A method for enhancing the depth of focus process window during a lithography process includes applying a photoresist layer comprising a photoacid generator on a material layer disposed on a substrate, exposing a first portion of the photoresist layer unprotected by a photomask to light radiation in a lithographic exposure process, providing a thermal energy to the photoresist layer in a post-exposure baking process, applying an electric field or a magnetic field while performing the post-exposure baking process, and dynamically changing a frequency of the electric field as generated while providing the thermal energy to the photoresist layer.

Abstract: Disclosed are methods, apparatus, systems, and computer readable storage media for providing a persistent feeder component in a user interface to display in near real-time feed items when received in information feeds of online social networks. The feed items can come from feeds of multiple online social networks to be displayed in a single feeder component, and the feeder component may be configured to display proximate to each feed item a graphical indicator identifying the information feed of the feed item. The feeder component can be displayed in one of multiple display formats. The feeder component may also be configured to track activity on an online social network and display a notification when activity on the online social network has met one or more milestones determined by the user.

Abstract: Disclosed are methods, apparatus, systems, and computer readable storage media for providing a persistent feeder component in a user interface to display in near real-time feed items when received in information feeds of online social networks. The feed items can come from feeds of multiple online social networks to be displayed in a single feeder component, and the feeder component may be configured to display proximate to each feed item a graphical indicator identifying the information feed of the feed item. The feeder component can be displayed in one of multiple display formats. The feeder component may also be configured to track activity on an online social network and display a notification when activity on the online social network has met one or more milestones determined by the user.