Patents by Inventor Srinivas Godavarthi

Srinivas Godavarthi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR DEVELOPING LOW DIELECTRIC CONSTANT FILM AND DEVICES OBTAINED THEREOF
    Publication number: 20140099796
    Abstract: A method for porogen removal of porous SiOCH film is provided, as well as devices obtained thereof. The devices and associated methods are in the field of advanced semiconductor interconnect technology, and more in particular in the development of dielectric films with low-k value.
    Type: Application
    Filed: October 3, 2013
    Publication date: April 10, 2014
    Applicants: Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, IMEC
    Inventors: Patrick Verdonck, Srinivas Godavarthi, Yasuhiro Matsumoto