Patents by Inventor Srinivasan Charkravarthi

Srinivasan Charkravarthi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Highly activated carbon selective epitaxial process for CMOS
    Patent number: 7348232
    Abstract: In accordance with the invention there is a method of forming a semiconductor device comprising forming a gate over a substrate, forming a source region and a drain region by doping a first portion and a second portion of active regions adjacent the gate, and forming a first recess in a portion of the source region and a second recess in a portion of the drain region. The method also includes activating the dopants in the source region and the drain region by heating the active regions and depositing a semiconductor material in the first recess and the second recess after activating the dopants in the source region and the drain region.
    Type: Grant
    Filed: March 1, 2005
    Date of Patent: March 25, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Periannan Chidambaram, Srinivasan Charkravarthi
  • Highly activated carbon selective epitaxial process for CMOS
    Publication number: 20060199285
    Abstract: In accordance with the invention there is a method of forming a semiconductor device comprising forming a gate over a substrate, forming a source region and a drain region by doping a first portion and a second portion of active regions adjacent the gate, and forming a first recess in a portion of the source region and a second recess in a portion of the drain region. The method also includes activating the dopants in the source region and the drain region by heating the active regions and depositing a semiconductor material in the first recess and the second recess after activating the dopants in the source region and the drain region.
    Type: Application
    Filed: March 1, 2005
    Publication date: September 7, 2006
    Inventors: P.R. Chidambaram, Srinivasan Charkravarthi