Patents by Inventor Srivatsa Madananth

Srivatsa Madananth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IN SITU FAILURE DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS
    Publication number: 20210175103
    Abstract: Exemplary semiconductor processing chambers may include a chamber body defining a substrate processing region. The chambers may include a substrate support positioned within the substrate processing region. The substrate support may include a ceramic or polymeric insulator plate positioned between a cathode assembly and an electrostatic chuck assembly. The chambers may include an acoustic emission probe in contact with the insulator plate of the substrate support.
    Type: Application
    Filed: December 6, 2019
    Publication date: June 10, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Srivatsa Madananth, Dhananjai Kumar, Yogananda Sarode Vishwanath, Jacob Andrews