Patents by Inventor Sseunhyeun Jo

Sseunhyeun Jo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection system with non-circular pupil
    Patent number: 11112691
    Abstract: An inspection system includes an illumination source configured to generate extreme ultraviolet (EUV) light, illumination optics to direct the EUV light to a sample within a range of off-axis incidence angles corresponding to an illumination pupil distribution, collection optics to collect light from the sample in response to the incident EUV light within a range of collection angles corresponding to an imaging pupil distribution, and a detector configured to receive at least a portion of the light collected by the collection optics. Further, a center of the illumination pupil distribution corresponds to an off-axis incidence angle along a first direction on the sample, and at least one of the illumination pupil distribution or the imaging pupil distribution is non-circular with a size along the first direction shorter than along a second direction perpendicular to the first direction.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: September 7, 2021
    Assignee: KLA Corporation
    Inventors: Damon F. Kvamme, Rui-fang Shi, Daniel C. Wack, Sseunhyeun Jo, Xin Ye
  • Inspection System with Non-Circular Pupil
    Publication number: 20200225574
    Abstract: An inspection system includes an illumination source configured to generate extreme ultraviolet (EUV) light, illumination optics to direct the EUV light to a sample within a range of off-axis incidence angles corresponding to an illumination pupil distribution, collection optics to collect light from the sample in response to the incident EUV light within a range of collection angles corresponding to an imaging pupil distribution, and a detector configured to receive at least a portion of the light collected by the collection optics. Further, a center of the illumination pupil distribution corresponds to an off-axis incidence angle along a first direction on the sample, and at least one of the illumination pupil distribution or the imaging pupil distribution is non-circular with a size along the first direction shorter than along a second direction perpendicular to the first direction.
    Type: Application
    Filed: January 25, 2019
    Publication date: July 16, 2020
    Inventors: Damon F. Kvamme, Rui-fang Shi, Daniel C. Wack, Sseunhyeun Jo, Xin Ye