Patents by Inventor Ssu-Pin Ma

Ssu-Pin Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050242892
    Abstract: A method for producing an oscillating signal comprises: generating an oscillating signal by discharging after charging to a high trigger level and charging after discharging to a low trigger level; and turbo-charging at the initial of a change-over from charging to discharging while resuming a normal charging/discharging thereafter, and vice versa. The present invention makes use of the turbo-charging/discharging for a linear compensation, such that the produced oscillating signal has the features of concurrently eliminating phase noises and jitters as well as maintaining the modulation linearity.
    Type: Application
    Filed: April 29, 2005
    Publication date: November 3, 2005
    Inventors: Ssu-Pin Ma, Shao-Hua Chen
  • Patent number: 6881996
    Abstract: A metal-insulator-metal (MIM) capacitor structure and method of fabrication for CMOS circuits having copper interconnections are described. The method provides metal capacitors with high figure of merit Q (Xc/R) and which does not require additional masks and metal layers. The method forms a copper capacitor bottom metal (CBM) electrode while concurrently forming the pad contacts and level of copper interconnections by the damascene process. An insulating (Si3N4) metal protect layer is formed on the copper and a capacitor interelectrode dielectric layer is formed. A metal protecting buffer is used to protect the thin interelectrode layer, and openings are etched to pad contacts and interconnecting lines. A TiN/AlCu/TiN metal layer is deposited and patterned to form the capacitor top metal (CTM) electrodes, the next level of interconnections, and to provide a pad protect layer on the copper pad contacts.
    Type: Grant
    Filed: September 7, 2004
    Date of Patent: April 19, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Chun-Hon Chen, Ssu-Pin Ma, Ta-Hsun Yeh, Yen-Shih Ho, Kuo-Reay Peng, Heng-Ming Hsu, Kong-Beng Thei, Chi-Wu Chou
  • Publication number: 20050029566
    Abstract: A metal-insulator-metal (MIM) capacitor structure and method of fabrication for CMOS circuits having copper interconnections are described. The method provides metal capacitors with high figure of merit Q (Xc/R) and which does not require additional masks and metal layers. The method forms a copper capacitor bottom metal (CBM) electrode while concurrently forming the pad contacts and level of copper interconnections by the damascene process. An insulating (Si3N4) metal protect layer is formed on the copper and a capacitor interelectrode dielectric layer is formed. A metal protecting buffer is used to protect the thin interelectrode layer, and openings are etched to pad contacts and interconnecting lines. A TiN/AlCu/TiN metal layer is deposited and patterned to form the capacitor top metal (CTM) electrodes, the next level of interconnections, and to provide a pad protect layer on the copper pad contacts.
    Type: Application
    Filed: September 7, 2004
    Publication date: February 10, 2005
    Inventors: Chun-Hon Chen, Ssu-Pin Ma, Ta-Hsun Yeh, Yen-Shih Ho, Kuo-Reay Peng, Heng-Ming Hsu, Kong-Beng Thei, Chi-Wu Chou
  • Patent number: 6812088
    Abstract: This MIM structure provides metal capacitors with high figure of merit Q (Xc/R) and does not require additional masks and metal layers. A copper capacitor bottom metal (CBM) electrode is formed, while concurrently forming the pad contacts and level of copper interconnections by the damascene process. An insulating (Si3N4) metal protect layer is formed on the copper and a capacitor interelectrode dielectric layer is formed. A metal protecting buffer protects the thin interelectrode layer, and openings are etched to pad contacts and interconnecting lines. A TiN/AlCu/TiN metal layer is deposited and patterned to form the capacitor top metal (CTM) electrodes, the next level of interconnections, and to provide a pad protect layer on the copper pad contacts. The thick TiN/AlCu/TiN CTM electrode reduces the capacitor series resistance and improves the capacitor figure of merit Q, while the pad protect layer protects the copper from corrosion.
    Type: Grant
    Filed: June 11, 2002
    Date of Patent: November 2, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hon Chen, Ssu-Pin Ma, Ta-Hsun Yeh, Yen-Shih Ho, Kuo-Reay Peng, Heng-Ming Hsu, Kong-Beng Thei, Chi-Wu Chou
  • Patent number: 6667217
    Abstract: A process for integrating the fabrication of a thick, copper inductor structure, with the fabrication of narrow channel length CMOS devices, has been developed. The integrated process features the use of only one additional photolithographic masking step, used to form the opening in an IMD layer, that will accommodate the subsequent inductor structure. After forming damascene type openings in the same IMD layer, in the CMOS region, copper is deposited and then defined, to result in a thick, copper inductor structure, in the opening in the IMD layer, in a first region of a semiconductor substrate, as well as to result in copper interconnect structures, in the damascene type openings located in a second region of the semiconductor structure, used for the narrow channel length CMOS devices. The use of a thick, copper inductor structure, equal to the thickness of the IMD layer, results in increased inductance, or an increased quality factor, when compared to counterparts formed with thinner metal inductors.
    Type: Grant
    Filed: March 1, 2001
    Date of Patent: December 23, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Heng-Ming Hsu, Jau-Yuann Chung, Yen-Shih Ho, Chun-Hon Chen, Kuo-Reay Peng, Ta-Hsun Yeh, Kong-Beng Thei, Ssu-Pin Ma
  • Patent number: 6489816
    Abstract: A frequency converter circuit and method is disclosed. The circuit may comprise: two pairs of differential amplifying transistors; two current mirrors, wherein each of the two current mirrors is operable to feed a respective one of the two pairs of differential amplifying transistors; a further pair of differential amplifying transistors, wherein each transistor of the further pair of differential amplifying transistors is operable to feed a repective one of the two current mirrors; and a pair of bypass transistors connected in parallel with a controlling side of the two current mirrors, wherein the bypass transistors reduce a direct current component of a current being mirrored.
    Type: Grant
    Filed: September 7, 2001
    Date of Patent: December 3, 2002
    Assignee: Signia Technologies
    Inventor: Ssu-Pin Ma
  • Patent number: 6472721
    Abstract: In many mixed-signal or radio frequency Rf applications, inductors and capacitors are needed at the same time. For a high performance inductor devices, a thick metal layer is needed to increase performance, usually requiring an extra masking process. The present invention describes both a structure and method of fabricating both copper metal-insulator-metal (MIM) capacitors and thick metal inductors, simultaneously, with only one mask, for high frequency mixed-signal or Rf, CMOS applications, in a damascene and dual damascene trench/via process. High performance device structures formed by this invention include: parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, metal-insulator-metal (MIM) capacitors, thick inductor metal wiring, interconnects and contact vias.
    Type: Grant
    Filed: September 27, 2001
    Date of Patent: October 29, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Ssu-Pin Ma, Chun-Hon Chen, Ta-Hsun Yeh, Kuo-Reay Peng, Heng-Ming Hsu, Kong-Beng Thei, Chi-Wu Chou, Yen-Shih Ho
  • Publication number: 20020142512
    Abstract: Within a method for fabricating a microelectronic fabrication there is first provided a substrate. There is then formed over the substrate a spirally patterned conductor layer which terminates in a microelectronic structure within the center of the spirally patterned conductor layer. The spirally patterned conductor layer forms a planar spiral inductor, and the microelectronic structure formed within the center of the spirally patterned conductor layer further comprises a series of electrically interconnected sub-patterns. The method contemplates a microelectronic fabrication fabricated in accord with the method. The microelectronic fabrication is fabricated with optimal performance while occupying minimal microelectronic substrate area.
    Type: Application
    Filed: March 29, 2001
    Publication date: October 3, 2002
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.,
    Inventors: Ssu-Pin Ma, Yen-Shih Ho
  • Patent number: 6444517
    Abstract: A new method is provided for the creation of an inductive over the surface of a semiconductor substrate. A first layer of metal is created in a layer of dielectric, a second layer of metal is created overlying the first layer of metal. The first layer of metal combined with the second layer of metal form an inductor of increased height, reducing the resistivity of the inductor, increasing the Q value of the inductor. The new method of creating an inductor can be combined with creating contact points that connect to contact points in the active region of the surface of a semiconductor substrate.
    Type: Grant
    Filed: January 23, 2002
    Date of Patent: September 3, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Heng-Ming Hsu, Shyh-Chyi Wong, Chaochieh Tsai, Ssu-Pin Ma, Chao-Cheng Chen, Liang-Kun Huang
  • Patent number: 6404030
    Abstract: A structure is disclosed for a multi-finger transistor with improved high frequency performance. An array of isolated active regions is formed in a semiconductor substrate. A source region and a drain region are formed in each of the active regions and are disposed on either side of a central channel region. A gate oxide layer is formed over each channel region. Conductive gate fingers that extend over the gate oxide layers and also beyond the active areas are formed so that each gate finger constitutes a continuous conductive line providing and connecting the gates of the plurality of active regions. A dielectric layer is formed over the active regions and over the surrounding isolation regions. A conductive via is formed through the dielectric layer to each source region and to each drain region. For each gate finger or conductive via is opened between the active region and at both ends of the finger contact region is formed over each conductive via.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: June 11, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Ssu-Pin Ma, Shyh-Chyi Wong
  • Publication number: 20020068385
    Abstract: A method for forming anchored bond pads on a semiconductor substrate and a semiconductor device containing such anchored bond pads are described. In the method, a plurality of via openings is first formed in a dielectric material layer on top of a semiconductor substrate. A metal is then filled into the plurality of via openings forming a plurality of via contacts and a bond pad on top of the dielectric material layer intimately connected to the plurality of via contacts. After the bond pad is defined by a photolithographic method, a bond pad that is anchored to the dielectric material layer by a plurality of via contacts is thus obtained. In an alternate embodiment, a first metal is used to form the plurality of via contacts, while a second metal is used to form the bond pad layer. A suitable first metal may be a refractory metal, while a suitable second metal may be aluminum or aluminum alloys. The first metal and the second metal may also be of the same material such as copper or a copper alloy.
    Type: Application
    Filed: December 1, 2000
    Publication date: June 6, 2002
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ssu-Pin Ma, Shyh-Chyi Wong, Chao-Chieh Tsai
  • Patent number: 6366764
    Abstract: A wireless LAN RF module uses parasitic element compensation devices in an antenna select circuit to improve port isolation. In addition, various combinations of RC filter networks and spurious radiation attenuators are incorporated into the Quad Demod/Mod and Synthesizer ;/circuits to provide suppression of EMI susceptibility and radiation throughout the RF module.
    Type: Grant
    Filed: May 8, 1998
    Date of Patent: April 2, 2002
    Assignee: Industrial Technology Research Institute
    Inventors: Wen-Wei Yang, Min Hung Shen, Chen-Chung Kuo, Shuw Guann Lin, Ssu-Pin Ma
  • Publication number: 20020019123
    Abstract: In many mixed-signal or radio frequency Rf applications, inductors and capacitors are needed at the same time. For a high performance inductor devices, a thick metal layer is needed to increase performance, usually requiring an extra masking process. The present invention describes both a structure and method of fabricating both copper metal-insulator-metal (MIM) capacitors and thick metal inductors, simultaneously, with only one mask, for high frequency mixed-signal or Rf, CMOS applications, in a damascene and dual damascene trench/via process. High performance device structures formed by this invention include: parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, metal-insulator-metal (MIM) capacitors, thick inductor metal wiring, interconnects and contact vias.
    Type: Application
    Filed: September 27, 2001
    Publication date: February 14, 2002
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    Inventors: Ssu-Pin Ma, Chun-Hon Chen, Ta-Hsun Yeh, Kuo-Reay Peng, Heng-Ming Hsu, Kong-Beng Thei, Chi-Wu Chou, Yen-Shih Ho
  • Patent number: 6329234
    Abstract: In many mixed-signal or radio frequency Rf applications, inductors and capacitors are needed at the same time. For a high performance inductor devices, a thick metal layer is needed to increase performance, usually requiring an extra masking process. The present invention describes both a structure and method of fabricating both copper metal-insulator-metal (MIM) capacitors and thick metal inductors, simultaneously, with only one mask, for high frequency mixed-signal or Rf, CMOS applications, in a damascene and dual damascene trench/via process. High performance device structures formed by this invention include: parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, metal-insulator-metal (MIM) capacitors, thick inductor metal wiring, interconnects and contact vias.
    Type: Grant
    Filed: July 24, 2000
    Date of Patent: December 11, 2001
    Assignee: Taiwan Semiconductor Manufactuirng Company
    Inventors: Ssu-Pin Ma, Chun-Hon Chen, Ta-Hsun Yeh, Kuo-Reay Peng, Heng-Ming Hsu, Kong-Beng Thei, Chi-Wu Chou, Yen-Shih Ho
  • Patent number: 6205171
    Abstract: A wireless LAN RF module uses a low power transistor switchable voltage divider circuit to control the bias input of a GaAs MESFET output power amplifier. This bias control circuit provides stable, high speed on-off switching of the power amplifier stage by applying low power bias voltages to the MESFET gate input, rather than by interrupting the high power MESFET drain to Vdd circuit.
    Type: Grant
    Filed: May 8, 1998
    Date of Patent: March 20, 2001
    Assignee: Industrial Technology Research Institute
    Inventors: Wen-Wei Yang, Min Hung Shen, Chen-Chung Kuo, Shuw Guann Lin, Ssu-Pin Ma
  • Patent number: 5809188
    Abstract: A tunable optical fiber filter or reflector is composed of a single-mode optical fiber having UV-induced fiber gratings in its core region. A planar surface is formed by a mechanical polishing technique such that the planar surface is contiguous to the core region of the optical fiber. The planar surface is covered with a material having a refractive index close to the refractive index of the optical fiber. As the refractive index of the material is changed, the tuning of the reflection or transmission spectra of the optical fiber filter or reflector is attained. The tunable optical fiber filter or reflector is used in optical communication systems, sensoring systems, or as external cavities of lasers.
    Type: Grant
    Filed: March 14, 1997
    Date of Patent: September 15, 1998
    Assignee: National Science Council
    Inventors: Shiao-Min Tseng, Ssu-Pin Ma, Kuang-Yu Hsu, Yinchieh Lai, Kuochou Tai
  • Patent number: 5781675
    Abstract: A method for preparing a fiber-optic polarizer involves a first step in which the cladding layer of a single-mode optical fiber is side-polished to form a planar surface contiguous to the core region of the single-mode optical fiber. The planar surface is formed thereon a buffer dielectric/metal composite thin film, or the planar surface is coated by sputtering with a metal layer which is then coated with a medium having a refractive index matching to that of the optical fiber. The polishing of the single-mode optical fiber is done by using a semiconductor substrate having one or more V-shaped recesses having a large curvature radius.
    Type: Grant
    Filed: March 14, 1997
    Date of Patent: July 14, 1998
    Assignee: National Science Council
    Inventors: Shiao-Min Tseng, Ssu-Pin Ma, Kun-Fa Chen, Kuang-Yu Hsu