Patents by Inventor SsuChun Peng

SsuChun Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140342101
    Abstract: A method for preparing the low temperature ploy-silicon film, which includes the following steps: providing a substrate; forming an amorphous silicon layer on the substrate; forming a silicon oxide layer on the amorphous silicon layer by a plasma process; and performing a laser crystallizing process to the amorphous silicon layer. An embodiment of the present invention prepares the silicon oxide film in the low temperature ploy-silicon film by the plasma enhanced chemical vapor deposition process, which improves the overall uniformity of the silicon oxide film and owns a preferred roughness surface.
    Type: Application
    Filed: May 15, 2014
    Publication date: November 20, 2014
    Applicant: EverDisplay Optronics (Shanghai) Limited
    Inventors: SsuChun Peng, ChienHung Wu, Chong Liu, XiaoLong Yan