Patents by Inventor Stéphane BAILLOUX

Stéphane BAILLOUX has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-axis positioning device
    Patent number: 10481102
    Abstract: A multi-axis positioning system that may be used in conjunction with an inspection system includes multiple position sensors corresponding to multiple axes in conjunction with multiple motors also corresponding to multiple axes to provide high accuracy, high load and extended travel for controllable movement of an object in up to 6 degrees of freedom. Some embodiments of the multi-axis positioning system may include an x-y stage assembly, a bottom plate assembly coupled to the x-y stage assembly, a top plate assembly coupled to the bottom plate assembly, and a chuck secured to the top plate assembly with multiple position sensors configured to measure displacement between the x-y stage assembly and top plate assembly.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: November 19, 2019
    Assignee: NEWPORT CORPORATION
    Inventors: Alain Jeanne, Stéphane Bailloux, Laurent Courtemanche
  • MULTI-AXIS POSITIONING DEVICE
    Publication number: 20180340895
    Abstract: A multi-axis positioning system that may be used in conjunction with an inspection system includes multiple position sensors corresponding to multiple axes in conjunction with multiple motors also corresponding to multiple axes to provide high accuracy, high load and extended travel for controllable movement of an object in up to 6 degrees of freedom. Some embodiments of the multi-axis positioning system may include an x-y stage assembly, a bottom plate assembly coupled to the x-y stage assembly, a top plate assembly coupled to the bottom plate assembly, and a chuck secured to the top plate assembly with multiple position sensors configured to measure displacement between the x-y stage assembly and top plate assembly.
    Type: Application
    Filed: August 2, 2018
    Publication date: November 29, 2018
    Applicant: NEWPORT CORPORATION
    Inventors: Alain JEANNE, Stéphane BAILLOUX, Laurent COURTEMANCHE
  • Multi-axis positioning device
    Patent number: 10073043
    Abstract: A multi-axis positioning system that may be used in conjunction with an inspection system includes multiple position sensors corresponding to multiple axes in conjunction with multiple motors also corresponding to multiple axes to provide high accuracy, high load and extended travel for controllable movement of an object in up to 6 degrees of freedom. Some embodiments of the multi-axis positioning system may include an x-y stage assembly, a bottom plate assembly coupled to the x-y stage assembly, a top plate assembly coupled to the bottom plate assembly, and a chuck secured to the top plate assembly with multiple position sensors configured to measure displacement between the x-y stage assembly and top plate assembly.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: September 11, 2018
    Assignee: NEWPORT CORPORATION
    Inventors: Alain Jeanne, Stéphane Bailloux, Laurent Courtemanche
  • MULTI-AXIS POSITIONING DEVICE
    Publication number: 20170153186
    Abstract: A multi-axis positioning system that may be used in conjunction with an inspection system includes multiple position sensors corresponding to multiple axes in conjunction with multiple motors also corresponding to multiple axes to provide high accuracy, high load and extended travel for controllable movement of an object in up to 6 degrees of freedom. Some embodiments of the multi-axis positioning system may include an x-y stage assembly, a bottom plate assembly coupled to the x-y stage assembly, a top plate assembly coupled to the bottom plate assembly, and a chuck secured to the top plate assembly with multiple position sensors configured to measure displacement between the x-y stage assembly and top plate assembly.
    Type: Application
    Filed: July 3, 2014
    Publication date: June 1, 2017
    Applicant: NEWPORT CORPORATION
    Inventors: Alain JEANNE, Stéphane BAILLOUX, Laurent COURTEMANCHE