Patents by Inventor Stéphane Denorme
Stéphane Denorme has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9881928Abstract: An integrated circuit includes a silicon-on-insulator substrate that includes a semiconductor film located above a buried insulating layer. A first electrode of a silicide material overlies the semiconductor film. A sidewall insulating material is disposed along sidewalls of the first electrode. A dielectric layer is located between the first electrode and the semiconductor film. A second electrode includes a silicided zone of the semiconductor film, which is located alongside the sidewall insulating material and extends at least partially under the dielectric layer and the first electrode. The first electrode, the dielectric layer and the second electrode form a capacitor that is part of a circuit of the integrated circuit.Type: GrantFiled: January 24, 2017Date of Patent: January 30, 2018Assignee: STMICROELECTRONICS SAInventors: Stéphane Denorme, Philippe Candelier
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Publication number: 20170133390Abstract: An integrated circuit includes a silicon-on-insulator substrate that includes a semiconductor film located above a buried insulating layer. A first electrode of a silicide material overlies the semiconductor film. A sidewall insulating material is disposed along sidewalls of the first electrode. A dielectric layer is located between the first electrode and the semiconductor film. A second electrode includes a silicided zone of the semiconductor film, which is located alongside the sidewall insulating material and extends at least partially under the dielectric layer and the first electrode. The first electrode, the dielectric layer and the second electrode form a capacitor that is part of a circuit of the integrated circuit.Type: ApplicationFiled: January 24, 2017Publication date: May 11, 2017Inventors: Stéphane Denorme, Philippe Candelier
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Patent number: 9589968Abstract: An integrated circuit includes a silicon on insulator substrate having a semiconductor film located above a buried insulating layer. At least one memory cell of the one-time-programmable type includes an MOS capacitor having a first electrode region including a gate region at least partially silicided and flanked by an insulating lateral region, a dielectric layer located between the gate region and the semiconductor film, and a second electrode region including a silicided zone of the semiconductor film, located alongside the insulating lateral region and extending at least partially under the dielectric layer.Type: GrantFiled: November 25, 2015Date of Patent: March 7, 2017Assignee: STMicroelectronics SAInventors: Stéphane Denorme, Philippe Candelier
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Publication number: 20160343720Abstract: An integrated circuit includes a silicon on insulator substrate having a semiconductor film located above a buried insulating layer. At least one memory cell of the one-time-programmable type includes an MOS capacitor having a first electrode region including a gate region at least partially silicided and flanked by an insulating lateral region, a dielectric layer located between the gate region and the semiconductor film, and a second electrode region including a silicided zone of the semiconductor film, located alongside the insulating lateral region and extending at least partially under the dielectric layer.Type: ApplicationFiled: November 25, 2015Publication date: November 24, 2016Inventors: Stéphane Denorme, Philippe Candelier
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Patent number: 9275891Abstract: A process for fabricating an integrated circuit includes, in a stack of layers including a silicon substrate overlaid with a buried insulating layer overlaid with a silicon layer, etching first trenches into the silicon substrate, depositing a silicon nitride layer on the silicon layer to fill the first trenches and form first trench isolations, forming a mask on the silicon nitride layer, etching second trenches into the silicon substrate, in a pattern defined by the mask, to a depth greater than a depth of the first trenches, filling the second trenches with an electrical insulator to form second trench isolations, carrying out a chemical etch until the silicon layer is exposed, and forming a FET by forming a channel, a source, and a drain of the field effect transistor in the silicon layer.Type: GrantFiled: May 29, 2013Date of Patent: March 1, 2016Assignees: Commissariat a l'energie atomique et aux energies alternatives, STMicroelectronics (Crolles 2) SASInventors: Claire Fenouillet-Beranger, Stéphane Denorme
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Patent number: 8936993Abstract: A hybrid substrate comprises first and second active areas made from semiconductor materials laterally offset from one another and separated by an isolation area. The main surfaces of the isolation area and of the first active area form a plane. The hybrid substrate is obtained from a source substrate successively comprising layers made from a first and second semiconductor materials separated by an isolation layer. A single etching mask is used to pattern the isolation area, first active area and second active area. The main surface of the first active area is released thereby forming voids in the source substrate. The etching mask is eliminated above the first active area. A first isolation material is deposited, planarized and etched until the main surface of the first active area is released.Type: GrantFiled: December 22, 2010Date of Patent: January 20, 2015Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, STMicroelectronics (Crolles 2) SASInventors: Claire Fenouillet-Béranger, Stéphane Denorme, Philippe Coronel
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Publication number: 20130323903Abstract: A process for fabricating an integrated circuit includes, in a stack of layers including a silicon substrate overlaid with a buried insulating layer overlaid with a silicon layer, etching first trenches into the silicon substrate, depositing a silicon nitride layer on the silicon layer to fill the first trenches and form first trench isolations, forming a mask on the silicon nitride layer, etching second trenches into the silicon substrate, in a pattern defined by the mask, to a depth greater than a depth of the first trenches, filling the second trenches with an electrical insulator to form second trench isolations, carrying out a chemical etch until the silicon layer is exposed, and forming a FET by forming a channel, a source, and a drain of the field effect transistor in the silicon layer.Type: ApplicationFiled: May 29, 2013Publication date: December 5, 2013Inventors: Claire Fenouillet-Beranger, Stéphane Denorme
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Patent number: 8368128Abstract: An etching mask, comprising the delineation pattern of the gate electrode, of a source contact, a drain contact and a counter-electrode contact, is formed on a substrate of semi-conductor on insulator type. The substrate is covered by a layer of dielectric material and a gate material. The counter-electrode contact is located in the pattern of the gate electrode. The gate material is etched to define the gate electrode, the source contact and drain contacts and the counter-electrode contact. A part of the support substrate is released through the pattern of the counter-electrode contact area. An electrically conductive material is deposited on the free part of the support substrate to form the counter-electrode contact.Type: GrantFiled: June 3, 2011Date of Patent: February 5, 2013Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, STMicroelectronics (Crolles 2) SASInventors: Claire Fenouillet-Béranger, Olivier Thomas, Philippe Coronel, Stéphane Denorme
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Patent number: 8314453Abstract: The memory cell is of SRAM type with four transistors provided with a counter-electrode. It comprises a first area made from semiconductor material with a first transfer transistor and a first driver transistor connected in series, their common terminal defining a first electric node. A second transfer transistor and a second driver transistor are connected in series on a second area made from semiconductor material and their common terminal defines a second electric node. The support substrate comprises first and second counter-electrodes. The first and second counter-electrodes are located respectively facing the first and second semiconductor material areas. The first transfer transistor and second driver transistor are on a first side of a plane passing through the first and second electric nodes whereas the first driver transistor and second transfer transistor are on the other side of the plane.Type: GrantFiled: March 28, 2011Date of Patent: November 20, 2012Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, STMicroelectronics (Crolles 2) SASInventors: Olivier Thomas, Claire Fenouillet-Béranger, Philippe Coronel, Stéphane Denorme
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Publication number: 20110316055Abstract: A support substrate comprises first and second counter-electrodes arranged in the same plane at the level of a surface of the support substrate. An electrically insulating area separates the first and second counter-electrodes. A semi-conducting area with first and second portions is separated from the support substrate by an electrically insulating material. The electrically insulating material is different from the material forming the support substrate. The first portion of the semi-conducting area is facing the first counter-electrode. The second portion of the semi-conducting area is facing the second counter-electrode.Type: ApplicationFiled: June 20, 2011Publication date: December 29, 2011Applicants: STMICROELECTRONICS (CROLLES 2) SAS, COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Philippe CORONEL, Claire FENOUILLET-BÉRANGER, Stéphane DENORME, Olivier THOMAS
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Publication number: 20110298019Abstract: An etching mask, comprising the delineation pattern of the gate electrode, of a source contact, a drain contact and a counter-electrode contact, is formed on a substrate of semi-conductor on insulator type. The substrate is covered by a layer of dielectric material and a gate material. The counter-electrode contact is located in the pattern of the gate electrode. The gate material is etched to define the gate electrode, the source contact and drain contacts and the counter-electrode contact. A part of the support substrate is released through the pattern of the counter-electrode contact area. An electrically conductive material is deposited on the free part of the support substrate to form the counter-electrode contact.Type: ApplicationFiled: June 3, 2011Publication date: December 8, 2011Applicants: STMICROELECTRONICS (CROLLES 2) SAS, COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Claire FENOUILLET-BÉRANGER, Olivier THOMAS, Philippe CORONEL, Stéphane DENORME
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Publication number: 20110291199Abstract: The memory cell is of SRAM type with four transistors provided with a counter-electrode. It comprises a first area made from semiconductor material with a first transfer transistor and a first driver transistor connected in series, their common terminal defining a first electric node. A second transfer transistor and a second driver transistor are connected in series on a second area made from semiconductor material and their common terminal defines a second electric node. The support substrate comprises first and second counter-electrodes. The first and second counter-electrodes are located respectively facing the first and second semiconductor material areas. The first transfer transistor and second driver transistor are on a first side of a plane passing through the first and second electric nodes whereas the first driver transistor and second transfer transistor are on the other side of the plane.Type: ApplicationFiled: March 28, 2011Publication date: December 1, 2011Applicants: STMICROELECTRONICS (CROLLES 2) SAS, COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Olivier THOMAS, Claire FENOUILLET-BÉRANGER, Philippe CORONEL, Stéphane DENORME
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Publication number: 20110147881Abstract: A hybrid substrate comprises first and second active areas made from semiconductor materials laterally offset from one another and separated by an isolation area. The main surfaces of the isolation area and of the first active area form a plane. The hybrid substrate is obtained from a source substrate successively comprising layers made from a first and second semiconductor materials separated by an isolation layer. A single etching mask is used to pattern the isolation area, first active area and second active area. The main surface of the first active area is released thereby forming voids in the source substrate. The etching mask is eliminated above the first active area. A first isolation material is deposited, planarized and etched until the main surface of the first active area is released.Type: ApplicationFiled: December 22, 2010Publication date: June 23, 2011Applicants: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMICROELECTRONICS (CROLLES 2) SASInventors: Claire FENOUILLET-BÉRANGER, Stéphane DENORME, Philippe CORONEL