Patents by Inventor Stéphane GODNY

Stéphane GODNY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for inspecting a surface of an object comprising nonsimilar materials
    Patent number: 11287246
    Abstract: A method and related device for measuring the profile of a surface of an object to be measured having zones made from at least two different materials, the object to be measured forming part of a plurality of substantially identical objects, the plurality of objects also including at least one reference object having at least one reference surface, the method including the following steps: determining a correction function, from a first profile signal of a first reference surface and a second profile signal from a second reference surface, the second reference surface being metallized; acquiring a profile signal from the surface of the object to be measured; and applying the correction function to the profile signal from the surface of the object to be measured to obtain a corrected profile signal; the profile signals being obtained from interferometric measurements.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: March 29, 2022
    Assignees: UNITY SEMICONDUCTOR, COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ALTERNATIVES
    Inventors: Jean-François Boulanger, Stéphane Godny
  • METHOD AND DEVICE FOR INSPECTING A SURFACE OF AN OBJECT COMPRISING NONSIMILAR MATERIALS
    Publication number: 20210239462
    Abstract: A method and related device for measuring the profile of a surface of an object to be measured having zones made from at least two different materials, the object to be measured forming part of a plurality of substantially identical objects, the plurality of objects also including at least one reference object having at least one reference surface, the method including the following steps: determining a correction function, from a first profile signal of a first reference surface and a second profile signal from a second reference surface, the second reference surface being metallized; acquiring a profile signal from the surface of the object to be measured; and applying the correction function to the profile signal from the surface of the object to be measured to obtain a corrected profile signal; the profile signals being obtained from interferometric measurements.
    Type: Application
    Filed: January 25, 2019
    Publication date: August 5, 2021
    Inventors: Jean-François BOULANGER, Stéphane GODNY