Abstract: The disclosure provides a subassembly of an optical system, in particular in a microlithographic projection exposure apparatus, with an element and at least one temperature-controlling device for controlling the temperature of this element. The temperature-controlling device has a cooling medium in a closed circuit with at least one tube-like portion. The cooling medium is transportable away from the element or to the element in the tube-like portion while performing a two-phase transition. A heating device is provided for interrupting the transport of the cooling medium by heating up the cooling medium.

Abstract: A cooling system for at least one system component of an optical system for EUV applications comprises at least one cooling channel and a cooling medium for passing through the at least one cooling channel, absorbing heat from the at least one system component and for carrying off the heat. The cooling medium comprises a dielectric fluid, excluding pure water, 1,1,1,2-Tetrafluoroethane (R134a) and Chlorodifluoro-methane (R22).The dielectric fluid comprises a liquid phase at an operating pressure below 10 bar and in a temperature range of approximately 10° C. to approximately 50° C.

Abstract: A solar panel configured to reduce contaminant accumulation thereon, including a surface adapted to harvest solar energy; and a vortex-inducing generator including chevron-shaped features disposed across at least a portion of the surface to reduce contaminant accumulation thereon by causing air flow passing over the surface to remove at least some contaminants deposited thereon and/or keeping particles entrained in the air flow to reduce deposition on the surface. A method of passively cleaning a solar panel includes providing the solar panel, and positioning the solar panel such that the leading edge is oriented to intercept a prevailing wind direction. A solar array includes a plurality of the solar panels, wherein each solar panel is positioned such that the leading edge is oriented to intercept a prevailing wind direction.

Abstract: A biopsy needle includes tissue capture elements within the needle lumen to help hold a tissue sample within the needle and maintain its integrity. According to one aspect, several flexible members form a structure that allows tissue to enter the lumen during advancement of the needle into tissue, and prevents the tissue sample from exiting the needle during retraction of the needle. The flexible members may, in some embodiments, include cutting edges configured to cut the tissue sample from the target tissue mass at the start of needle extraction.