Patents by Inventor Stanley S. Chim

Stanley S. Chim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus of measuring line structures with an optical microscope by data clustering and classification
    Patent number: 5375175
    Abstract: A method of processing images obtained with a microscope along a line on an object, in which the object, having trenches or lines, is moved in the z direction to form a cloud plot; signals in the z direction are scanned to form a linescan vector; the linescan vectors are clustered and classified; a centroid is defined; a similarity curve is created from the linescan vectors and the centroids; and the distance between adjacent points on the similarity curve are measured to provide a measure of line or trench width.
    Type: Grant
    Filed: March 6, 1992
    Date of Patent: December 20, 1994
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Gordon S. Kino, Stanley S. Chim