Patents by Inventor Stanley SHIN

Stanley SHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for inspecting a wafer process chamber
    Patent number: 11067515
    Abstract: An apparatus for inspecting a wafer process chamber is disclosed. In one example, the apparatus includes: a sensor, a processor, and a lifetime predictor. The sensor captures information about at least one hardware part of the wafer process chamber. The processor processes the information to determine a hardware condition of the at least one hardware part. The lifetime predictor predicts an expected lifetime left for the at least one hardware part based on the hardware condition.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: July 20, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Stanley Shin, Kai-Hsiang Chang, Sheng Cho Lin, Keith Kuang-Kuo Koai
  • APPARATUS AND METHOD FOR INSPECTING A WAFER PROCESS CHAMBER
    Publication number: 20190162675
    Abstract: An apparatus for inspecting a wafer process chamber is disclosed. In one example, the apparatus includes: a sensor, a processor, and a lifetime predictor. The sensor captures information about at least one hardware part of the wafer process chamber. The processor processes the information to determine a hardware condition of the at least one hardware part. The lifetime predictor predicts an expected lifetime left for the at least one hardware part based on the hardware condition.
    Type: Application
    Filed: February 23, 2018
    Publication date: May 30, 2019
    Inventors: Stanley SHIN, Kai-Hsiang Chang, S.C. Lin, Keith Kuang-Kuo Koai