Abstract: Systems and methods for handling wafers include retrieving a first wafer from a wafer cassette using a first arm, transferring the first wafer from the first transfer arm to a second arm, delivering the first wafer for processing to a process chamber using the second arm, removing the first wafer from the process chamber using the first arm, and returning the first wafer to the cassette using the first arm. The systems and methods can include retrieving a first wafer from a wafer cassette using a first arm, delivering the first wafer for processing to a process chamber using the first arm, removing a processed wafer from the process chamber using a second arm, returning the processed wafer to the cassette using the second arm, and iteratively retrieving, delivering, removing and returning wafers from the cassette while alternating arms between iterations.

Abstract: A method and system can align a robot arm with a payload station. A probe and a contact detector may be positioned on the robot arm and three pins may be placed on the payload station. A controller may move the robot arm in a pattern over the payload station until contact may be made between the probe and one of the pins. A search about the contact location may be performed to obtain additional contacts. The search may be interrupted when contact is made between the probe and one of the pins. The position of the pin may be calculated from three such contacts on the spherical portion of the pin. The location of the probe at the time of contact may be stored and a localized search about the pin location may be performed. If the position of the pin cannot be resolved from three contacts, additional contacts may be made until a combination of three contacts does provide a solution.

Abstract: A method and system to calibrate a handler robot can include determining positions for stations between which the robot will transfer payloads, performing a transfer of a payload by the robot between the stations, measuring an offset and angle of the payload from the determined position of the station to which it was transferred and updating the determined position of that station based on the measured offset and angle.

Abstract: Systems and methods for handling wafers include retrieving a first wafer from a wafer cassette using a first arm, transferring the first wafer from the first transfer arm to a second arm, delivering the first wafer for processing to a process chamber using the second arm, removing the first wafer from the process chamber using the first arm, and returning the first wafer to the cassette using the first arm. The systems and methods can include retrieving a first wafer from a wafer cassette using a first arm, delivering the first wafer for processing to a process chamber using the first arm, removing a processed wafer from the process chamber using a second arm, returning the processed wafer to the cassette using the second arm, and iteratively retrieving, delivering, removing and returning wafers from the cassette while alternating arms between iterations.

Abstract: A chromatography stand for supporting a chromatographic column in use for chromatographic analysis has a first and a second platen adapted to receive and hold the chromatographic column therebetween. The first and second platens are mounted on a frame in generally opposed relation for relative movement toward and away from each other. At least one of the first and second platens is constructed for plug-in connection to the chromatographic column such that the column is positively located relative to the platens and placed in fluid connection through said at least one platen. In one embodiment, the cartridges can be stacked between the platens. The cartridges can be quickly and efficiently pre-loaded with sample.