Abstract: The present invention is to provide an auxiliary tool for dismantling a guide ring, and an application method of the same. The auxiliary tool of the present invention for dismantling a guide ring is to install a plurality of supporting elements on the top of a guide ring whose structure is the same as that of the guide ring to be dismantled, thereby dismantling the guide ring closely engaged with a top ring module, wherein the top ring module is used in a chemical-mechanical polishing (CMP) machine for carrying a wafer, and the guide ring to be dismantled is for holding the wafer within the top ring module. The application method of the auxiliary tool for dismantling a guide ring is first to insert the supporting elements of the auxiliary tool of the present invention into the grooves of the top ring modules, and thereafter to tap a combined surface of the guide ring and top ring module in a way like plotting a circle, so as to disengage the guide ring from the top ring module.

Abstract: The present invention is to provide an auxiliary tool for dismantling a guide ring, and an application method of the same. The auxiliary tool of the present invention for dismantling a guide ring is to install a plurality of supporting elements on the top of a guide ring whose structure is the same as that of the guide ring to be dismantled, thereby dismantling the guide ring closely engaged with a top ring module, wherein the top ring module is used in a chemical-mechanical polishing (CMP) machine for carrying a wafer, and the guide ring to be dismantled is for holding the wafer within the top ring module. The application method of the auxiliary tool for dismantling a guide ring is first to insert the supporting elements of the auxiliary tool of the present invention into the grooves of the top ring modules, and thereafter to tap a combined surface of the guide ring and top ring module in a way like plotting a circle, so as to disengage the guide ring from the top ring module.

Abstract: Acceleration sensing apparatus comprises a casing having a pair of substantially perpendicular passages communicating with each other and accommodating spaced apart, normally open electrical contacts. One of the passages contains mercury which is operable to flow into the other passage in response to predetermined acceleration of the casing and bridge the conductors so as to establish a current path therebetween.