Patents by Inventor Stefan B. Kaemmer

Stefan B. Kaemmer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source
    Publication number: 20160033547
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Application
    Filed: June 9, 2015
    Publication date: February 4, 2016
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Method and apparatus of physical property measurement using a probe-based nano-localized light source
    Patent number: 9052336
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Grant
    Filed: November 4, 2014
    Date of Patent: June 9, 2015
    Assignee: Bruker Nano, Inc.
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source
    Publication number: 20150067930
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Application
    Filed: November 4, 2014
    Publication date: March 5, 2015
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Method and apparatus of physical property measurement using a probe-based nano-localized light source
    Patent number: 8881311
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: November 4, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source
    Publication number: 20140259234
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Application
    Filed: March 10, 2014
    Publication date: September 11, 2014
    Applicant: Bruker Nano, Inc.
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su