Abstract: The disclosure relates to an optical integrator configured to produce a plurality of secondary light sources in an illumination system of a microlithographic projection exposure apparatus. The disclosure also relates to a method of manufacturing an array of elongated microlenses for use in such an illumination system. Arrays of elongated microlenses are often contained in optical integrators or scattering plates of such illumination systems.

Abstract: A generator drive apparatus includes: a rotor shaft having a generally annular open end; a gear unit including a stationary member and a plurality of intermeshed gears, the gear unit disposed at least partially within the open end and drivingly coupled to the rotor shaft; and an electric power generator mounted to the stationary member and drivingly coupled to the gear set.

Abstract: A method for processing the surface of a component, or the processing of an optical element through an ion beam, directed onto the surface to be processed, so that the surface is lowered and/or removed at least partially, wherein the ions have a kinetic energy of 100 keV or more, as well as optical elements processed by the method.

Abstract: The disclosure relates to an optical integrator configured to produce a plurality of secondary light sources in an illumination system of a microlithographic projection exposure apparatus. The disclosure also relates to a method of manufacturing an array of elongated microlenses for use in such an illumination system. Arrays of elongated microlenses are often contained in optical integrators or scattering plates of such illumination systems.

Abstract: A generator drive apparatus includes: a rotor shaft having a generally annular open end; a gear unit including a stationary member and a plurality of intermeshed gears, the gear unit disposed at least partially within the open end and drivingly coupled to the rotor shaft; and an electric power generator mounted to the stationary member and drivingly coupled to the gear set.

Abstract: The disclosure relates to an optical integrator configured to produce a plurality of secondary light sources in an illumination system of a microlithographic projection exposure apparatus. The disclosure also relates to a method of manufacturing an array of elongated microlenses for use in such an illumination system. Arrays of elongated microlenses are often contained in optical integrators or scattering plates of such illumination systems.

Abstract: A method for producing an element having at least one arbitrarily freely formed surface (freeform surface) having a high accuracy of form and a low surface roughness. The freeform surface is obtained by at least one first processing step with a shaping material processing method in which at least an approximation to the desired freeform surface (target form) is effected, and at least one second step with a material processing method that smooths the surface, wherein at least during the second processing step of the smoothing material processing, the element (1) to be processed is elastically stressed by force introduction such that the freeform surface to be smoothed is processed by smoothing processes for spherical, plane or aspherical surfaces.

Abstract: The disclosure relates to methods for producing mirrors, in particular facet mirrors, and projection exposure apparatuses equipped with the mirrors.

Abstract: The disclosure relates to an optical integrator configured to produce a plurality of secondary light sources in an illumination system of a microlithographic projection exposure apparatus. The disclosure also relates to a method of manufacturing an array of elongated microlenses for use in such an illumination system. Arrays of elongated microlenses are often contained in optical integrators or scattering plates of such illumination systems.

Abstract: A method for processing the surface of a component, or the processing of an optical element through an ion beam, directed onto the surface to be processed, so that the surface is lowered and/or removed at least partially, wherein the ions have a kinetic energy of 100 keV or more, as well as optical elements processed by the method.

Abstract: The invention relates to a molded piston, in particular an injection-molded piston (1) of fiber-reinforced plastic, which is seated slidably in a receiving bore (2) of a housing (4) and is embodied as a cup-shaped body with a piston bottom (6) and a sleevelike piston wall (8) protruding away from the bottom, and the face (10) of the piston bottom (6) pointing away from the piston wall (8)is pressure-loadable, and there is at least one injection point (46) oriented with a molding channel of a molding tool. The invention proposes that the injection point (46) is disposed on the other face (22) of the piston bottom (6), that is, the face pointing away from the pressure-loadable face (10), and the piston bottom (6), because of one or more recesses (48) present in this face (22), has a lesser wall thickness in the region of the injection point (46) than in the regions (52) adjoining it.