Patents by Inventor Stefan F. Suszko

Stefan F. Suszko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of examining microcircuit patterns
    Patent number: 4623255
    Abstract: Examination of microstructures of LSI and VLSI devices is facilitated by employing a method in which the device is photographed through a darkfield illumination optical microscope and the resulting negative subjected to inverse processing to form a positive on a photographic film. The film is then developed to form photographic prints or transparencies which clearly illustrate the structure of the device. The entire structure of a device may be examined by alternately photographing the device and selectively etching layers of the device in order to expose underlying layers.
    Type: Grant
    Filed: October 13, 1983
    Date of Patent: November 18, 1986
    Assignee: The United States of America as represented by the Administrator, National Aeronautics and Space Administration
    Inventor: Stefan F. Suszko