Patents by Inventor Stefan Gertrud Marie Hendriks

Stefan Gertrud Marie Hendriks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and sensor calibration method
    Patent number: 7999912
    Abstract: A method for calibrating an auxiliary sensor system is provided. The auxiliary sensor system measures a position of a grating relative to a reference, the grating forming part of an encoder measurement system. The encoder measurement system is adapted to measure a position of a substrate table of a lithographic apparatus and further comprises a sensor mounted to the substrate table. The method comprises exciting the grating to make a movement in at least one measurement direction of the auxiliary sensor system, obtaining an auxiliary sensor system output signal from the sensor system during the movement, and adjusting a parameter of the auxiliary sensor system based on the output signal obtained during the movement to thereby calibrate the auxiliary sensor system.
    Type: Grant
    Filed: May 8, 2007
    Date of Patent: August 16, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens, Lodewijk Alexander Schijvenaars, Tom Van Zutphen
  • Lithographic apparatus and sensor calibration method
    Publication number: 20080278702
    Abstract: A method for calibrating an auxiliary sensor system is provided. The auxiliary sensor system measures a position of a grating relative to a reference, the grating forming part of an encoder measurement system. The encoder measurement system is adapted to measure a position of a substrate table of a lithographic apparatus and further comprises a sensor mounted to the substrate table. The method comprises exciting the grating to make a movement in at least one measurement direction of the auxiliary sensor system, obtaining an auxiliary sensor system output signal from the sensor system during the movement, and adjusting a parameter of the auxiliary sensor system based on the output signal obtained during the movement to thereby calibrate the auxiliary sensor system.
    Type: Application
    Filed: May 8, 2007
    Publication date: November 13, 2008
    Applicant: ASML Netherlands B.V.
    Inventors: Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens, Lodewijk Alexander Schijvenaars, Tom Van Zutphen
  • System and method for moving an object employing piezo actuators
    Patent number: 6977461
    Abstract: A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The possible displacement of the object is limited by the maximum shear of the piezo actuators. To increase the possible displacement, the piezo actuators may be controlled to perform a linear shear sequence or a shuffle sequence. During the linear shear sequence, the object is moved; during the shuffle sequence the object is substantially stationary, while the piezo actuators are repositioned with respect to the object, after which the object may be moved further using the linear shear sequence.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: December 20, 2005
    Assignee: ASML Netherlands B.V.
    Inventors: Stefan Gertrud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers