Patents by Inventor Stefan Gustavson

Stefan Gustavson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Graphics engine for high precision lithography
    Patent number: 7715641
    Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
    Type: Grant
    Filed: November 5, 2007
    Date of Patent: May 11, 2010
    Assignee: Micronic Laser Systems AB
    Inventors: Martin Olsson, Stefan Gustavson, Torbjörn Sandström, Per Elmfors
  • Graphics engine for high precision lithography
    Patent number: 7646919
    Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
    Type: Grant
    Filed: November 2, 2007
    Date of Patent: January 12, 2010
    Assignee: Micronic Laser Systems AB
    Inventors: Martin Olsson, Stefan Gustavson, Torbjörn Sandström, Per Elmfors
  • GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY
    Publication number: 20080080782
    Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
    Type: Application
    Filed: November 2, 2007
    Publication date: April 3, 2008
    Applicant: Micronic Laser Systems AB
    Inventors: Martin Olsson, Stefan Gustavson, Torbjorn Sandstrom, Per Elmfors
  • GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY
    Publication number: 20080074700
    Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
    Type: Application
    Filed: November 5, 2007
    Publication date: March 27, 2008
    Inventors: Martin Olsson, Stefan Gustavson, Torbjorn Sandstrom, Per Elmfors
  • Graphics engine for high precision lithography
    Patent number: 7302111
    Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
    Type: Grant
    Filed: September 12, 2001
    Date of Patent: November 27, 2007
    Assignee: Micronic Laser Systems A.B.
    Inventors: Martin Olsson, Stefan Gustavson, Torbjörn Sandström, Per Elmfors
  • Graphics engine for high precision lithography
    Publication number: 20030160980
    Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
    Type: Application
    Filed: September 12, 2001
    Publication date: August 28, 2003
    Inventors: Martin Olsson, Stefan Gustavson, Torbjorn Sandstrom, Per Elmfors