Abstract: A ventilator with integrated breathing air humidifier has at least two defined air pathways provided in the breathing air humidifier. The breathing air humidifier is installed and fixed on a horizontal surface of the ventilator. The breathing air humidifier comprises at least a top part and a bottom part, a water reservoir being provided in the bottom part, wherein the top part cannot be removed from the bottom part when the unit is in at least one operating mode. The ventilator may have an air humidifier with at least one water reservoir, and at least one filling device for the water reservoir in the breathing air humidifier, wherein the filing device can be operated with one hand and/or opened with one hand.

Abstract: A method and apparatus for breathing including a blower mounted in a specific part made of silicone, which reduces blower immissions and emissions. The conducting structure influences the flow of the respiratory gas in order to reduce interference when measuring the volumetric flow.

Abstract: A method and apparatus for breathing, in which a blower is mounted in a specific part made of silicone, which reduces blower immissions and emissions. Moreover, the conducting structure influences the flow of the respiratory gas in order to reduce interference when measuring the volumetric flow.

Abstract: A deposition apparatus for coating a flexible substrate is described. The deposition apparatus comprises a first spool chamber housing a storage spool for providing the flexible substrate, a deposition chamber arranged downstream from the first spool chamber, and a second spool chamber arranged downstream from the deposition chamber and housing a wind-up spool for winding the flexible substrate thereon after deposition. The deposition chamber comprises a coating drum for guiding the flexible substrate past a plurality of deposition units including at least one deposition unit having a graphite target. The coating drum is connected to a device for applying an electrical potential to the coating drum.

Abstract: A hygiene filter for a device for artificial respiration, having at least one filter for filtering microorganisms and/or solid particles from a respiratory air volume flow, and a device for artificial respiration, having a holding device within the air intake region. The filter material is designed as a seal against the respiratory air volume flow conducting elements such that the risk of the occurrence of secondary air is reduced.

Abstract: A deposition apparatus for coating a flexible substrate is described. The deposition apparatus includes a first spool chamber housing a storage spool for providing the flexible substrate, a deposition chamber arranged downstream from the first spool chamber, and a second spool chamber arranged downstream from the deposition chamber and housing a wind-up spool for winding the flexible substrate thereon after deposition. The deposition chamber includes a coating drum for guiding the flexible substrate past a plurality of deposition units including at least one deposition unit having a graphite target. Further, the deposition chamber includes a coating treatment device configured to densify a layer deposited on the flexible substrate.

Abstract: An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.

Abstract: An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.

Abstract: A vacuum processing system for a flexible substrate is provided. The processing system includes a first chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a second chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a maintenance zone between the first chamber and the second chamber; and a first process chamber for depositing material on the flexible substrate, wherein the second chamber is provided between the maintenance zone and the first process chamber. The maintenance zone allows for maintenance access to at least one of the first chamber and the second chamber.

Abstract: A ventilator with integrated breathing air humidifier has at least two defined air pathways provided in the breathing air humidifier. The breathing air humidifier is installed and fixed on a horizontal surface of the ventilator. The breathing air humidifier comprises at least a top part and a bottom part, a water reservoir being provided in the bottom part, wherein the top part cannot be removed from the bottom part when the unit is in at least one operating mode. The ventilator may have an air humidifier with at least one water reservoir, and at least one filling device for the water reservoir in the breathing air humidifier, wherein the filing device can be operated with one hand and/or opened with one hand.

Abstract: A method and apparatus for breathing including a blower mounted in a specific part made of silicone, which reduces blower immissions and emissions. The conducting structure influences the flow of the respiratory gas in order to reduce interference when measuring the volumetric flow.

Abstract: A method and apparatus for breathing, in which a blower is mounted in a specific part made of silicone, which reduces blower immissions and emissions. Moreover, the conducting structure influences the flow of the respiratory gas in order to reduce interference when measuring the volumetric flow.

Abstract: A ventilator with integrated breathing air humidifier has at least two defined air pathways provided in the breathing air humidifier. The breathing air humidifier is installed and fixed on a horizontal surface of the ventilator. The breathing air humidifier comprises at least a top part and a bottom part, a water reservoir being provided in the bottom part, wherein the top part cannot be removed from the bottom part when the unit is in at least one operating mode. The ventilator may have an air humidifier with at least one water reservoir, and at least one filling device for the water reservoir in the breathing air humidifier, wherein the filing device can be operated with one hand and/or opened with one hand.

Abstract: An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit.

Abstract: A hygiene filter for a device for artificial respiration, having at least one filter for filtering microorganisms and/or solid particles from a respiratory air volume flow, and a device for artificial respiration, having a holding device within the air intake region. The filter material is designed as a sealing means against the respiratory air volume flow conducting elements such that the risk of the occurrence of secondary air is reduced.

Abstract: An apparatus for depositing a thin film on a substrate is described. The apparatus includes a substrate support having an outer surface for guiding the substrate along a surface of the substrate support through a first vacuum processing region and at least one second vacuum processing region, a first deposition sources corresponding to the first processing region and at least one second deposition source corresponding to the at least one second vacuum processing region. The apparatus further includes one or more vacuum flanges providing at least a further gas outlet between the first deposition source and the at least one second deposition source.

Abstract: An apparatus includes a substrate support having an outer surface for guiding the substrate through a first vacuum processing region and at least one second vacuum processing region. First and second deposition sources correspond to the first processing region and at least one second deposition source corresponds to the at least one second vacuum processing region, wherein at least the first deposition source includes an electrode having a surface that opposes the substrate support. A processing gas inlet and a processing gas outlet are arranged at opposing sides of the surface of the electrode. At least one separation gas inlet how one or more openings, wherein the one or more openings are at least provided at one of opposing sides of the electrode surface such that the processing gas inlet and/or the processing gas outlet are provided between the one or more openings and the surface of the electrode.

Abstract: A vacuum processing system for a flexible substrate is provided. The processing system includes a first chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a second chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a maintenance zone between the first chamber and the second chamber; and a first process chamber for depositing material on the flexible substrate, wherein the second chamber is provided between the maintenance zone and the first process chamber. The maintenance zone allows for maintenance access to at least one of the first chamber and the second chamber.

Abstract: An apparatus for processing a flexible substrate is described.

Abstract: According to the present disclosure, a method for cleaning the processing chamber of a flexible substrate processing apparatus without breaking the vacuum in the processing chamber is provided. The method for cleaning the processing chamber includes guiding a sacrificial foil into the processing chamber; initiating a first pump process in the processing chamber; plasma cleaning the processing chamber while the sacrificial foil is provided in the processing chamber; initiating a second pump process in the processing chamber; and guiding a flexible substrate into the processing chamber.