Patents by Inventor Stefan Helbig

Stefan Helbig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas separation
    Patent number: 9556517
    Abstract: A device for gas movement in vacuum-coating systems is disclosed that extracts gaseous coating material in the coating chamber that has not been deposited on the substrates to be coated. At least one pump for extracting the coating material is connected to it in an axial extension of the suction device; the suction device has one or more suction openings and is divided up into at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: January 31, 2017
    Assignee: Meyer Burger (Germany) AG
    Inventors: Joachim Mai, Daniel Decker, Stefan Helbig, Oliver Loewel
  • Gas Separation
    Publication number: 20150225847
    Abstract: A device for gas movement in vacuum-coating systems is disclosed that extracts gaseous coating material in the coating chamber that has not been deposited on the substrates to be coated. At least one pump for extracting the coating material is connected to it in an axial extension of the suction device; the suction device has one or more suction openings and is divided up into at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.
    Type: Application
    Filed: July 23, 2013
    Publication date: August 13, 2015
    Inventors: Joachim Mai, Daniel Decker, Stefan Helbig, Oliver Loewel