Patents by Inventor Stefan Panzer

Stefan Panzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for processing substrates
    Patent number: 6079098
    Abstract: When processing substrates in a plurality of automatic processing units that are arranged following one another, the positional coordinates of the substrates as well as additional geometrical data about circuit markings or function markings, are determined in each automatic processing unit and employed for the processing. The geometrical data is determined only in the first automatic processing unit and is communicated via a bus system to the second automatic processing unit. It is utilized in the second automatic processing unit, which leads to a lower time expenditure.
    Type: Grant
    Filed: October 28, 1998
    Date of Patent: June 27, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventors: Kai Soellner, Stefan Panzer