Patents by Inventor Stefan Reineck

Stefan Reineck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement for the production of a plasma
    Patent number: 5102523
    Abstract: The invention relates to an arrangement for the production of a plasma as well as for applying charged and uncharged particles onto a substrate. Two areal electrodes connected to a voltage source are provided between which a plasma volume excited by high-frequency energy is ignited. The areal ratio of the two electrodes is variable in order to influence the energy of the ions impinging on a substrate. Furthermore, supplying of process gas distributed over the entire substrate area is possible.
    Type: Grant
    Filed: October 25, 1990
    Date of Patent: April 7, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Siegfried Beisswenger, Barbara Beichler, Michael Geisler, Stefan Reineck