Patents by Inventor Stefan Schaff

Stefan Schaff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical arrangement, in particular lithography system
    Patent number: 10809636
    Abstract: An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: October 20, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau, Marwène Nefzi, Viktor Kulitzki, Axel Lorenz, Stefan Schaff
  • OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM
    Publication number: 20190339626
    Abstract: An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.
    Type: Application
    Filed: July 16, 2019
    Publication date: November 7, 2019
    Inventors: Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau, Marwène Nefzi, Viktor Kulitzki, Axel Lorenz, Stefan Schaff
  • Optical waveguide for guiding illumination light
    Patent number: 10254466
    Abstract: An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: April 9, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christian Wald, Stefan Schaff, Markus Deguenther, Daniel Runde
  • OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT
    Publication number: 20170261680
    Abstract: An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.
    Type: Application
    Filed: May 30, 2017
    Publication date: September 14, 2017
    Inventors: Christian Wald, Stefan Schaff, Markus Deguenther, Daniel Runde
  • Optical waveguide for guiding illumination light
    Patent number: 9671548
    Abstract: An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: June 6, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christian Wald, Stefan Schaff, Markus Deguenther, Daniel Runde
  • Optical Waveguide for Guiding Illumination Light
    Publication number: 20150362660
    Abstract: An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.
    Type: Application
    Filed: August 24, 2015
    Publication date: December 17, 2015
    Inventors: Christian Wald, Stefan Schaff, Markus Deguenther, Daniel Runde