Abstract: A vacuum valve (1) for loading and/or unloading a vacuum chamber (2). The vacuum valve has a closure plate (3) that is pressed against a valve seat (4) when in a closed position to seal a loading opening (5) and being raised from the valve seat (4) when in an open position, exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2). The vacuum valve has at least one drive (6) for moving the closure plate (3) back and forth between the open and closed positions, the closure plate (3) being held by at least one guide (7) on at least one plate holder (8) of the drive (6). The vacuum valve has at least one elastic preload body (9), with the closure plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).

Abstract: A vacuum valve (1) for loading and/or unloading a vacuum chamber (2). The vacuum valve has a closure plate (3) that is pressed against a valve seat (4) when in a closed position to seal a loading opening (5) and being raised from the valve seat (4) when in an open position, exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2). The vacuum valve has at least one drive (6) for moving the closure plate (3) back and forth between the open and closed positions, the closure plate (3) being held by at least one guide (7) on at least one plate holder (8) of the drive (6). The vacuum valve has at least one elastic preload body (9), with the closure plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).

Abstract: A closing unit for a vacuum valve includes a first valve plate (7) for closing a first valve opening (2) of the vacuum valve, a second valve plate (8) for closing a second valve opening (3) of the vacuum valve, and a carrier plate (19) that lies between the valve plates (7, 8) to which the valve plates (7, 8) are fastened detachably. For fastening a corresponding valve plate (7, 8) to the carrier plate (19), at least one clamping piece (20, 21) is used by which interacting clamping surfaces (22-26) are clamped with each other. Of the interacting clamping surfaces (22-26), at least one is constructed as an angular surface by which the corresponding valve plate (7, 8) is pressed against the carrier plate (19).

Abstract: A closing unit for a vacuum valve includes a first valve plate (7) for closing a first valve opening (2) of the vacuum valve, a second valve plate (8) for closing a second valve opening (3) of the vacuum valve, and a carrier plate (19) that lies between the valve plates (7, 8) to which the valve plates (7, 8) are fastened detachably. For fastening a corresponding valve plate (7, 8) to the carrier plate (19), at least one clamping piece (20, 21) is used by which interacting clamping surfaces (22-26) are clamped with each other. Of the interacting clamping surfaces (22-26), at least one is constructed as an angular surface by which the corresponding valve plate (7, 8) is pressed against the carrier plate (19).