Patents by Inventor Stefan Seiwert

Stefan Seiwert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for producing extreme ultraviolet radiation and soft x-ray radiation
    Publication number: 20040183037
    Abstract: A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography,
    Type: Application
    Filed: March 26, 2004
    Publication date: September 23, 2004
    Inventors: Jurgen Klein, Willi Neff, Stefan Seiwert, Klaus Bergmann, Joseph Pankert, Michael Loken