Patents by Inventor Stefan Soens

Stefan Soens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tool health information monitoring and tool performance analysis in semiconductor processing
    Patent number: 7630858
    Abstract: A plurality of tool identifiers, a plurality of information types, and a plurality of report types are displayed in a first user interface of a tool health reporting system. A user selection of a distinct report type from the plurality of report types, a distinct information type from the plurality of information types, and a distinct tool identifier from the plurality of tool identifiers are received. A report is displayed in a second user interface of the tool health reporting system, the report including data associated with the distinct information type, the distinct report type and the distinct tool identifier, wherein the report correlates equipment based measurement data to product level measurement data.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: December 8, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Susan Weiher-Telford, Stefan Soens
  • Tool health information monitoring and tool performance analysis in semiconductor processing
    Patent number: 7454312
    Abstract: A computer-implemented method, system and computer program device are provided for monitoring production of semiconductor products to detect potential defect excursions. Equipment based data is collected reflecting equipment performance for a plurality of semiconductor manufacturing tools used for processing a plurality of semiconductor products. Also, product level data is collected reflecting product quality for the plurality of semiconductor products processed on the plurality of manufacturing tools. At least a portion of the product level data and at least a portion of the equipment based data are then correlated. At least one report is generated of the correlation of data.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: November 18, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Susan Weiher, Stefan Soens
  • Tool health information monitoring and tool performance analysis in semiconductor processing
    Publication number: 20070219738
    Abstract: A computer-implemented method, system and computer program device are provided for monitoring production of semiconductor products to detect potential defect excursions. Equipment based data is collected reflecting equipment performance for a plurality of semiconductor manufacturing tools used for processing a plurality of semiconductor products. Also, product level data is collected reflecting product quality for the plurality of semiconductor products processed on the plurality of manufacturing tools. At least a portion of the product level data and at least a portion of the equipment based data are then correlated. At least one report is generated of the correlation of data.
    Type: Application
    Filed: March 15, 2006
    Publication date: September 20, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Susan Weiher, Stefan Soens