Abstract: The invention relates to a method for depositing new elements on a substrate of interest by means of a beam of focused ions and a platform for cooling the substrate of interest to cryogenic temperatures that can also rough out defective elements that are located on same. In addition, the invention relates to a device that comprises all the means necessary for carrying out the method, in particular the means necessary for condensing precursor gases on the surface of the substrate of interest at cryogenic temperatures. The method and the device of the invention can be used to remove and repair, for example, metal contacts of an electronic device or of an integrated circuit, or to repair, for example, portions of an optical lithography mask. Therefore, the present invention is applicable in the electronics industry and in the field of nanotechnology.