Patents by Inventor Stefan Stufler

Stefan Stufler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS device stress-reducing structure
    Patent number: 11142453
    Abstract: A MEMS device is disclosed. In an embodiment a MEMS device includes a substrate having an active region and at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier, wherein the connection element comprises a stress-reducing structure.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: October 12, 2021
    Assignee: TDK CORPORATION
    Inventors: Klaus Mayer, Christian Siegel, Anton Leidl, Wolfgang Pahl, Stefan Stufler
  • MEMS Device
    Publication number: 20190375630
    Abstract: A MEMS device is disclosed. In an embodiment a MEMS device includes a substrate having an active region and at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier, wherein the connection element comprises a stress-reducing structure.
    Type: Application
    Filed: June 6, 2019
    Publication date: December 12, 2019
    Inventors: Klaus Mayer, Christian Siegel, Anton Leidl, Wolfgang Pahl, Stefan Stufler