Patents by Inventor Stefan TROGER

Stefan TROGER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATTENUATION METHOD, AND A DEVICE MANUFACTURING METHOD
    Publication number: 20240175479
    Abstract: A positioning system for moving or positioning a moveable object, the system including: a dynamic support system including a reaction mass, a first support, a first spring system to support the reaction mass from the first support, a second support, a second spring system to support the first support from the second support, and a damping system to provide damping to the dynamic support system; and an actuator for generating a driving force between the moveable object and the reaction mass for moving or position the object, wherein a first eigenfrequency and a second eigenfrequency of the dynamic support system are substantially the same.
    Type: Application
    Filed: April 11, 2022
    Publication date: May 30, 2024
    Applicants: ASML Netherlands B.V., Carl Zeiss SMT GmbH
    Inventors: Maarten Hartger KIMMAN, Hans BUTLER, Johannes,Petrus,Martinus,Bernardus VERMEULEN, Stefan TROGER, Michael ERATH, Philipp GAIDA